Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11621152 | Methods and apparatus for processing a substrate using improved shield configurations | Jian J. Chen, Jeonghoon Oh | 2023-04-04 |
| 11508563 | Methods and apparatus for processing a substrate using improved shield configurations | Jian J. Chen, Jeonghoon Oh | 2022-11-22 |
| 11251067 | Pedestal lift for semiconductor processing chambers | Brian T. West, Miroslav Gelo, Yan Rozenzon, Roger M. Johnson, Mark William Covington +2 more | 2022-02-15 |
| 11056372 | Low temperature biasable substrate support | Brian T. West, Dinkesh HUDERI SOMANNA | 2021-07-06 |
| 10781518 | Gas cooled electrostatic chuck (ESC) having a gas channel formed therein and coupled to a gas box on both ends of the gas channel | Brian T. West, Manoj A. Gajendra | 2020-09-22 |