Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11911869 | Chemical mechanical polishing system with platen temperature control | Jeonghoon Oh, Jamie Stuart Leighton, Van H. Nguyen | 2024-02-27 |
| 11850700 | Sequential application of cleaning fluids for improved maintenance of chemical mechanical polishing systems | Jeonghoon Oh, Jamie Stuart Leighton, Van H. Nguyen | 2023-12-26 |
| 11251067 | Pedestal lift for semiconductor processing chambers | Brian T. West, Miroslav Gelo, Yan Rozenzon, Mark William Covington, Soundarrajan JEMBULINGAM +2 more | 2022-02-15 |
| 11114285 | Apparatus for exhaust cooling | Michael S. Cox, Brian T. West, Yan Rozenzon, Dinkesh Somanna, Dustin W. Ho | 2021-09-07 |
| 10930479 | Smart chamber and smart chamber components | Simon Nicholas Binns, Brian T. West, Ronald Vern Schauer, Michael S. Cox | 2021-02-23 |
| 10176973 | Method of cooling a composition using a hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system | Michael S. Cox, Rongping Wang, Brian T. West, Colin John Dickinson | 2019-01-08 |
| 10153143 | Smart chamber and smart chamber components | Simon Nicholas Binns, Brian T. West, Ronald Vern Schauer, Michael S. Cox | 2018-12-11 |
| 9754771 | Encapsulated magnetron | Brian T. West, Michael S. Cox | 2017-09-05 |
| 9552967 | Abatement system having a plasma source | Michael S. Cox, Rongping Wang, Brian T. West, Colin John Dickinson | 2017-01-24 |
| 9543124 | Capacitively coupled plasma source for abating compounds produced in semiconductor processes | Michael S. Cox, Rongping Wang, Brian T. West, Colin John Dickinson | 2017-01-10 |
| 9240308 | Hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system | Michael S. Cox, Rongping Wang, Brian T. West, Colin John Dickinson | 2016-01-19 |
| 9230780 | Hall effect enhanced capacitively coupled plasma source | Michael S. Cox, Rongping Wang, Brian T. West, Colin John Dickinson | 2016-01-05 |
| 8455368 | Methods and apparatus for assembling and operating electronic device manufacturing systems | Phil Chandler, Daniel O. Clark, Robbert M. Vermeulen, Jay J. Jung, Youssef A. Loldj +1 more | 2013-06-04 |
| 5812895 | Camera with negative identification system | Dale R. DuVall, Jerry W. Lindenfelser, Larry D. McClellan, Patrick J. Gilligan, Charles Swanson | 1998-09-22 |
| 5329325 | Synchronized zoom electronic camera system | Larry D. McClellan, Denis L. Larson, Rolf D. Ingersoll, Jerome W. Lindenfelser | 1994-07-12 |
| 5294950 | Identification system for automated film and order processing including machine and human readable code | Dale R. DuVall, Jerry W. Lindenfelser, Larry D. McClelland, Patrick J. Gilligan, Charles Swanson | 1994-03-15 |