| 11911869 |
Chemical mechanical polishing system with platen temperature control |
Jeonghoon Oh, Jamie Stuart Leighton, Van H. Nguyen |
2024-02-27 |
$57,915,000 |
| 11850700 |
Sequential application of cleaning fluids for improved maintenance of chemical mechanical polishing systems |
Jeonghoon Oh, Jamie Stuart Leighton, Van H. Nguyen |
2023-12-26 |
$30,871,000 |
| 11251067 |
Pedestal lift for semiconductor processing chambers |
Brian T. West, Miroslav Gelo, Yan Rozenzon, Mark William Covington, Soundarrajan JEMBULINGAM +2 more |
2022-02-15 |
$65,265,000 |
| 11114285 |
Apparatus for exhaust cooling |
Michael S. Cox, Brian T. West, Yan Rozenzon, Dinkesh Somanna, Dustin W. Ho |
2021-09-07 |
$49,370,000 |
| 10930479 |
Smart chamber and smart chamber components |
Simon Nicholas Binns, Brian T. West, Ronald Vern Schauer, Michael S. Cox |
2021-02-23 |
$34,793,000 |
| 10176973 |
Method of cooling a composition using a hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system |
Michael S. Cox, Rongping Wang, Brian T. West, Colin John Dickinson |
2019-01-08 |
$16,165,000 |
| 10153143 |
Smart chamber and smart chamber components |
Simon Nicholas Binns, Brian T. West, Ronald Vern Schauer, Michael S. Cox |
2018-12-11 |
$26,076,000 |
| 9754771 |
Encapsulated magnetron |
Brian T. West, Michael S. Cox |
2017-09-05 |
$19,227,000 |
| 9552967 |
Abatement system having a plasma source |
Michael S. Cox, Rongping Wang, Brian T. West, Colin John Dickinson |
2017-01-24 |
$20,961,000 |
| 9543124 |
Capacitively coupled plasma source for abating compounds produced in semiconductor processes |
Michael S. Cox, Rongping Wang, Brian T. West, Colin John Dickinson |
2017-01-10 |
$27,103,000 |
| 9240308 |
Hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system |
Michael S. Cox, Rongping Wang, Brian T. West, Colin John Dickinson |
2016-01-19 |
$15,148,000 |
| 9230780 |
Hall effect enhanced capacitively coupled plasma source |
Michael S. Cox, Rongping Wang, Brian T. West, Colin John Dickinson |
2016-01-05 |
$12,358,000 |
| 8455368 |
Methods and apparatus for assembling and operating electronic device manufacturing systems |
Phil Chandler, Daniel O. Clark, Robbert M. Vermeulen, Jay J. Jung, Youssef A. Loldj +1 more |
2013-06-04 |
$7,195,000 |
| 5812895 |
Camera with negative identification system |
Dale R. DuVall, Jerry W. Lindenfelser, Larry D. McClellan, Patrick J. Gilligan, Charles Swanson |
1998-09-22 |
$82,000 |
| 5329325 |
Synchronized zoom electronic camera system |
Larry D. McClellan, Denis L. Larson, Rolf D. Ingersoll, Jerome W. Lindenfelser |
1994-07-12 |
$166,000 |
| 5294950 |
Identification system for automated film and order processing including machine and human readable code |
Dale R. DuVall, Jerry W. Lindenfelser, Larry D. McClelland, Patrick J. Gilligan, Charles Swanson |
1994-03-15 |
$197,000 |
