Issued Patents All Time
Showing 25 most recent of 86 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12403561 | Eddy current monitoring to detect vibration in polishing | Kun Xu, Patrick A. Higashi, Hassan G. Iravani, Harry Q. Lee, Haosheng Wu +4 more | 2025-09-02 |
| 12337439 | Multiple disk pad conditioner | Jay Gurusamy, Steven M. Zuniga, Takashi Fujikawa | 2025-06-24 |
| 12048981 | Retaining ring having inner surfaces with features | Steven Mark Reedy, Simon Yavelberg, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu +1 more | 2024-07-30 |
| 12036635 | Methods of detecting non-conforming substrate processing events during chemical mechanical polishing | Ashish Bhushan, Jamie Stuart Leighton, John Garcia, Stephen Thomas Cormier, Nick Joseph Jackson +2 more | 2024-07-16 |
| 12033865 | Retaining ring having inner surfaces with facets | Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate | 2024-07-09 |
| 11911869 | Chemical mechanical polishing system with platen temperature control | Jamie Stuart Leighton, Van H. Nguyen, Roger M. Johnson | 2024-02-27 |
| 11890717 | Polishing system with platen for substrate edge control | Jay Gurusamy, Steven M. Zuniga | 2024-02-06 |
| 11850703 | Method of forming retaining ring with shaped surface | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more | 2023-12-26 |
| 11850700 | Sequential application of cleaning fluids for improved maintenance of chemical mechanical polishing systems | Jamie Stuart Leighton, Roger M. Johnson, Van H. Nguyen | 2023-12-26 |
| 11780046 | Polishing system with annular platen or polishing pad | Paul D. Butterfield, Thomas H. Osterheld, Shou-Sung Chang, Steven M. Zuniga, Fred C. Redeker | 2023-10-10 |
| 11768984 | Parameter sensing and computer modeling for gas delivery health monitoring | Ala Moradian, James L'HEUREUX, Shuran Sheng, Rohit Mahakali, Karthik Ramanathan +4 more | 2023-09-26 |
| 11764069 | Asymmetry correction via variable relative velocity of a wafer | Jimin Zhang, Brian J. Brown, Eric Lau, Ekaterina A. Mikhaylichenko, Gerald Alonzo | 2023-09-19 |
| 11717936 | Methods for a web-based CMP system | Dmitry Sklyar, Gerald Alonzo, Jonathan P. Domin, Steven M. Zuniga, Jay Gurusamy | 2023-08-08 |
| 11701749 | Monitoring of vibrations during chemical mechanical polishing | Boguslaw A. Swedek, Dominic J. Benvegnu, Chih Chung Chou, Nicholas A. Wiswell, Thomas H. Osterheld | 2023-07-18 |
| 11682561 | Retaining ring having inner surfaces with facets | Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate | 2023-06-20 |
| 11673226 | Retaining ring for CMP | Andrew J. Nagengast, Christopher Heung-Gyun Lee, Thomas Li, Anand N. Iyer, Jie Diao +3 more | 2023-06-13 |
| 11621152 | Methods and apparatus for processing a substrate using improved shield configurations | Soundarrajan JEMBULINGAM, Jian J. Chen | 2023-04-04 |
| 11597052 | Temperature control of chemical mechanical polishing | Hari Soundararajan, Shou-Sung Chang, Haosheng Wu, Jianshe Tang, Rajeev Bajaj +1 more | 2023-03-07 |
| 11577361 | Retaining ring with shaped surface and method of forming | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more | 2023-02-14 |
| 11511388 | Polishing system with support post and annular platen or polishing pad | Paul D. Butterfield, Thomas H. Osterheld, Shou-Sung Chang, Steven M. Zuniga, Fred C. Redeker | 2022-11-29 |
| 11508563 | Methods and apparatus for processing a substrate using improved shield configurations | Soundarrajan JEMBULINGAM, Jian J. Chen | 2022-11-22 |
| 11469080 | Magnetron assembly having coolant guide for enhanced target cooling | Dinkesh HUDERI SOMANNA, Brian T. West | 2022-10-11 |
| 11453099 | Retaining ring having inner surfaces with features | Steven Mark Reedy, Simon Yavelberg, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu +1 more | 2022-09-27 |
| 11440159 | Edge load ring | Uday Pai, Van H. Nguyen | 2022-09-13 |
| 11400560 | Retaining ring design | Charles C. Garretson, Eric Lau, Andrew J. Nagengast, Steven M. Zuniga, Edwin C. Suarez +2 more | 2022-08-02 |