| 12450807 |
Object synchronization apparatus and method |
Jungjoo Park, Soo Kil Shim, Bong Joon Kim, Seong Wook Hwang, Joon Young Kim |
2025-10-21 |
|
| 12403561 |
Eddy current monitoring to detect vibration in polishing |
Kun Xu, Patrick A. Higashi, Hassan G. Iravani, Harry Q. Lee, Haosheng Wu +4 more |
2025-09-02 |
|
| 12337439 |
Multiple disk pad conditioner |
Jay Gurusamy, Steven M. Zuniga, Takashi Fujikawa |
2025-06-24 |
|
| 12048981 |
Retaining ring having inner surfaces with features |
Steven Mark Reedy, Simon Yavelberg, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu +1 more |
2024-07-30 |
$79,851,000 |
| 12036635 |
Methods of detecting non-conforming substrate processing events during chemical mechanical polishing |
Ashish Bhushan, Jamie Stuart Leighton, John Garcia, Stephen Thomas Cormier, Nick Joseph Jackson +2 more |
2024-07-16 |
$116,305,000 |
| 12033865 |
Retaining ring having inner surfaces with facets |
Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate |
2024-07-09 |
$62,454,000 |
| 11911869 |
Chemical mechanical polishing system with platen temperature control |
Jamie Stuart Leighton, Van H. Nguyen, Roger M. Johnson |
2024-02-27 |
$57,915,000 |
| 11890717 |
Polishing system with platen for substrate edge control |
Jay Gurusamy, Steven M. Zuniga |
2024-02-06 |
$39,056,000 |
| 11850703 |
Method of forming retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2023-12-26 |
$30,871,000 |
| 11850700 |
Sequential application of cleaning fluids for improved maintenance of chemical mechanical polishing systems |
Jamie Stuart Leighton, Roger M. Johnson, Van H. Nguyen |
2023-12-26 |
$30,871,000 |
| 11780046 |
Polishing system with annular platen or polishing pad |
Paul D. Butterfield, Thomas H. Osterheld, Shou-Sung Chang, Steven M. Zuniga, Fred C. Redeker |
2023-10-10 |
$39,034,000 |
| 11768984 |
Parameter sensing and computer modeling for gas delivery health monitoring |
Ala Moradian, James L'HEUREUX, Shuran Sheng, Rohit Mahakali, Karthik Ramanathan +4 more |
2023-09-26 |
$66,272,000 |
| 11764069 |
Asymmetry correction via variable relative velocity of a wafer |
Jimin Zhang, Brian J. Brown, Eric Lau, Ekaterina A. Mikhaylichenko, Gerald Alonzo |
2023-09-19 |
$44,467,000 |
| 11717936 |
Methods for a web-based CMP system |
Dmitry Sklyar, Gerald Alonzo, Jonathan P. Domin, Steven M. Zuniga, Jay Gurusamy |
2023-08-08 |
$46,911,000 |
| 11701749 |
Monitoring of vibrations during chemical mechanical polishing |
Boguslaw A. Swedek, Dominic J. Benvegnu, Chih Chung Chou, Nicholas A. Wiswell, Thomas H. Osterheld |
2023-07-18 |
$58,990,000 |
| 11682561 |
Retaining ring having inner surfaces with facets |
Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate |
2023-06-20 |
$48,645,000 |
| 11673226 |
Retaining ring for CMP |
Andrew J. Nagengast, Christopher Heung-Gyun Lee, Thomas Li, Anand N. Iyer, Jie Diao +3 more |
2023-06-13 |
$42,513,000 |
| 11621152 |
Methods and apparatus for processing a substrate using improved shield configurations |
Soundarrajan JEMBULINGAM, Jian J. Chen |
2023-04-04 |
$41,324,000 |
| 11597052 |
Temperature control of chemical mechanical polishing |
Hari Soundararajan, Shou-Sung Chang, Haosheng Wu, Jianshe Tang, Rajeev Bajaj +1 more |
2023-03-07 |
$32,704,000 |
| 11577361 |
Retaining ring with shaped surface and method of forming |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2023-02-14 |
$35,617,000 |
| 11511388 |
Polishing system with support post and annular platen or polishing pad |
Paul D. Butterfield, Thomas H. Osterheld, Shou-Sung Chang, Steven M. Zuniga, Fred C. Redeker |
2022-11-29 |
$23,914,000 |
| 11508563 |
Methods and apparatus for processing a substrate using improved shield configurations |
Soundarrajan JEMBULINGAM, Jian J. Chen |
2022-11-22 |
$48,755,000 |
| 11469080 |
Magnetron assembly having coolant guide for enhanced target cooling |
Dinkesh HUDERI SOMANNA, Brian T. West |
2022-10-11 |
$43,708,000 |
| 11453099 |
Retaining ring having inner surfaces with features |
Steven Mark Reedy, Simon Yavelberg, Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu +1 more |
2022-09-27 |
$38,581,000 |
| 11440159 |
Edge load ring |
Uday Pai, Van H. Nguyen |
2022-09-13 |
$52,107,000 |
