Issued Patents All Time
Showing 51–75 of 86 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837423 | Semiconductor devices having channels with retrograde doping profile | Ilgweon Kim, Hyon Namkung | 2017-12-05 |
| 9790589 | Gas cooled substrate support for stabilized high temperature deposition | Brian T. West, Michael S. Cox | 2017-10-17 |
| 9779920 | Sputtering target with backside cooling grooves | Brian T. West, Michael S. Cox | 2017-10-03 |
| 9748125 | Continuous substrate processing system | Banqiu Wu, Nag B. Patibandla, Toshiaki Fujita, Ralf Hofmann, Pravin K. Narwankar +2 more | 2017-08-29 |
| 9731399 | Coated retaining ring | Daniel L. Martin, Simon Yavelberg | 2017-08-15 |
| 9610672 | Configurable pressure design for multizone chemical mechanical planarization polishing head | Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate | 2017-04-04 |
| 9484409 | Semiconductor devices including channel dopant layer | Eun-Sun Lee, Junhwa Song, Ji Hun Kim | 2016-11-01 |
| 9452505 | Textured membrane for a multi-chamber carrier head | Tsz-Sin Siu, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas Brezoczky | 2016-09-27 |
| 9368371 | Retaining ring having inner surfaces with facets | Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate | 2016-06-14 |
| 9186773 | Retaining ring with shaped surface | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more | 2015-11-17 |
| 9089007 | Method and apparatus for substrate support with multi-zone heating | Yao-Hung YANG, Frank Hooshdaran, Tom K. Cho, Tao Hou | 2015-07-21 |
| 8911151 | Substrate support bushing | Tao Hou, Tom K. Cho, Andrzej Matlosz, Frank Hooshdaran, Yao-Hung YANG | 2014-12-16 |
| 8808062 | Multi-chamber carrier head with a textured membrane | Tsz-Sin Siu, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas Brezoczky | 2014-08-19 |
| 8585468 | Retaining ring with shaped surface | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more | 2013-11-19 |
| 8469776 | Flexible membrane for carrier head | Steven M. Zuniga, Andrew J. Nagengast | 2013-06-25 |
| 8454413 | Multi-chamber carrier head with a textured membrane | Tsz-Sin Siu, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas Brezoczky | 2013-06-04 |
| 8388412 | Retaining ring with shaped profile | Gopalakrishna B. Prabhu, Yin Yuan, Gregory E. Menk | 2013-03-05 |
| 8088299 | Multiple zone carrier head with flexible membrane | Hung Chih Chen, Tsz-Sin Siu, Thomas Brezoczky, Steven M. Zuniga | 2012-01-03 |
| 8066551 | Retaining ring with shaped surface | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more | 2011-11-29 |
| 8033895 | Retaining ring with shaped profile | Gopalakrishna B. Prabhu, Yin Yuan, Gregory E. Menk | 2011-10-11 |
| 8021215 | Carrier head with retaining ring and carrier ring | Steven M. Zuniga, Andrew J. Nagengast | 2011-09-20 |
| 7950985 | Flexible membrane for carrier head | Steven M. Zuniga, Andrew J. Nagengast | 2011-05-31 |
| 7927190 | Retaining ring with shaped surface | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more | 2011-04-19 |
| 7901273 | Carrier ring for carrier head | Steven M. Zuniga, Andrew J. Nagengast | 2011-03-08 |
| 7842158 | Multiple zone carrier head with flexible membrane | Hung Chih Chen, Tsz-Sin Siu, Thomas Brezoczky, Steven M. Zuniga | 2010-11-30 |