TS

Tsz-Sin Siu

Applied Materials: 8 patents #1,541 of 7,310Top 25%
Overall (All Time): #634,504 of 4,157,543Top 20%
8
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
10702971 Textured membrane for a multi-chamber carrier head Jeonghoon Oh, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas Brezoczky 2020-07-07
9452505 Textured membrane for a multi-chamber carrier head Jeonghoon Oh, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas Brezoczky 2016-09-27
8808062 Multi-chamber carrier head with a textured membrane Jeonghoon Oh, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas Brezoczky 2014-08-19
8454413 Multi-chamber carrier head with a textured membrane Jeonghoon Oh, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas Brezoczky 2013-06-04
8088299 Multiple zone carrier head with flexible membrane Hung Chih Chen, Jeonghoon Oh, Thomas Brezoczky, Steven M. Zuniga 2012-01-03
7842158 Multiple zone carrier head with flexible membrane Hung Chih Chen, Jeonghoon Oh, Thomas Brezoczky, Steven M. Zuniga 2010-11-30
7255771 Multiple zone carrier head with flexible membrane Hung Chih Chen, Jeonghoon Oh, Thomas Brezoczky, Steven M. Zuniga 2007-08-14
7081042 Substrate removal from polishing tool Hung Chih Chen, Steven M. Zuniga 2006-07-25