| 10702971 |
Textured membrane for a multi-chamber carrier head |
Jeonghoon Oh, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas Brezoczky |
2020-07-07 |
| 9452505 |
Textured membrane for a multi-chamber carrier head |
Jeonghoon Oh, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas Brezoczky |
2016-09-27 |
| 8808062 |
Multi-chamber carrier head with a textured membrane |
Jeonghoon Oh, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas Brezoczky |
2014-08-19 |
| 8454413 |
Multi-chamber carrier head with a textured membrane |
Jeonghoon Oh, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas Brezoczky |
2013-06-04 |
| 8088299 |
Multiple zone carrier head with flexible membrane |
Hung Chih Chen, Jeonghoon Oh, Thomas Brezoczky, Steven M. Zuniga |
2012-01-03 |
| 7842158 |
Multiple zone carrier head with flexible membrane |
Hung Chih Chen, Jeonghoon Oh, Thomas Brezoczky, Steven M. Zuniga |
2010-11-30 |
| 7255771 |
Multiple zone carrier head with flexible membrane |
Hung Chih Chen, Jeonghoon Oh, Thomas Brezoczky, Steven M. Zuniga |
2007-08-14 |
| 7081042 |
Substrate removal from polishing tool |
Hung Chih Chen, Steven M. Zuniga |
2006-07-25 |