| 12381101 |
Semiconductor process equipment |
Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Lakshmikanth Krishnamurthy SHIRAHATTI |
2025-08-05 |
| 12347719 |
Floating pin for substrate transfer |
Sreenath SOVENAHALLI, Kirankumar Neelasandra SAVANDAIAH, Bhaskar PRASAD, Srinivasa Rao YEDLA |
2025-07-01 |
| 12266551 |
Apparatus, system, and method for non-contact temperature monitoring of substrate supports |
Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA |
2025-04-01 |
| D1063100 |
Diagnostic device with led display |
Clay D. Reber, Kelly Lewis Brezoczky, Frank B. Myers, III, Debkishore Mitra |
2025-02-18 |
| 12217982 |
Isolated volume seals and method of forming an isolated volume within a processing chamber |
Kirankumar Neelasandra SAVANDAIAH, Nitin Bharadwaj SATYAVOLU, Srinivasa Rao YEDLA, Bhaskar PRASAD |
2025-02-04 |
| 12195314 |
Cathode exchange mechanism to improve preventative maintenance time for cluster system |
Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA |
2025-01-14 |
| 12100614 |
Apparatus for controlling lift pin movement |
Anubhav Srivastava, Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Nitin Bharadwaj SATYAVOLU |
2024-09-24 |
| 12080571 |
Substrate processing module and method of moving a workpiece |
Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA |
2024-09-03 |
| 12043896 |
Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure |
Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Nitin Bharadwaj SATYAVOLU, Ganesh Subbuswamy, Devi Raghavee Veerappan |
2024-07-23 |
| 12002668 |
Thermal management hardware for uniform temperature control for enhanced bake-out for cluster tool |
Srinivasa Rao YEDLA, Kirankumar Neelasandra SAVANDAIAH, Hari Prasath Rajendran |
2024-06-04 |
| 11955355 |
Isolated volume seals and method of forming an isolated volume within a processing chamber |
Kirankumar Neelasandra SAVANDAIAH, Nitin Bharadwaj SATYAVOLU, Srinivasa Rao YEDLA, Bhaskar PRASAD |
2024-04-09 |
| 11817331 |
Substrate holder replacement with protective disk during pasting process |
Srinivasa Rao YEDLA, Kirankumar Neelasandra SAVANDAIAH, Bhaskar PRASAD, Nitin Bharadwaj SATYAVOLU |
2023-11-14 |
| 11772137 |
Reactive cleaning of substrate support |
Xi Chen, Shreesha Yogish Rao, Sheng Guo, Chi Hong Ching, Cheng-Hsiung Tsai |
2023-10-03 |
| 11749542 |
Apparatus, system, and method for non-contact temperature monitoring of substrate supports |
Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA |
2023-09-05 |
| 11691343 |
Three-dimensional printing and three-dimensional printers |
Benyamin Buller, Zachary Ryan Murphree, Richard J. Romano, Alan Rick Lappen |
2023-07-04 |
| 11674227 |
Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure |
Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Nitin Bharadwaj SATYAVOLU, Ganesh Subbuswamy, Devi Raghavee Veerappan |
2023-06-13 |
| 11646217 |
Transfer apparatus and substrate-supporting member |
Anubhav Srivastava, Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Lakshmikanth Krishnamurthy SHIRAHATTI |
2023-05-09 |
| 11610799 |
Electrostatic chuck having a heating and chucking capabilities |
Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Nitin Bharadwaj SATYAVOLU, Hari Prasath Rajendran +1 more |
2023-03-21 |
| 11600507 |
Pedestal assembly for a substrate processing chamber |
Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Nitin Bharadwaj SATYAVOLU |
2023-03-07 |
| 11446740 |
Multiple sequential linear powder dispensers for additive manufacturing |
Christopher A. Rowland, Anantha K. Subramani, Kasiraman Krishnan, Kartik Ramaswamy, Swaminathan Srinivasan +5 more |
2022-09-20 |
| D962470 |
Assay device with LCD display |
Clay D. Reber, Kelly Lewis Brezoczky, Frank B. Myers, III, Debkishore Mitra |
2022-08-30 |
| D953561 |
Diagnostic device with LED display |
Clay D. Reber, Kelly Lewis Brezoczky, Frank B. Myers, III, Debkishore Mitra |
2022-05-31 |
| 11292993 |
Systems and processes for treating textiles with an antimicrobial agent |
Sean Morham, William Morris, David E. Brown, Keith Copenhagen |
2022-04-05 |
| 10998209 |
Substrate processing platforms including multiple processing chambers |
Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA |
2021-05-04 |
| 10774460 |
Antimicrobial fabric application system |
Sean Morham, William Morris, David E. Brown, Keith Copenhagen |
2020-09-15 |
