| 12347719 |
Floating pin for substrate transfer |
Sreenath SOVENAHALLI, Kirankumar Neelasandra SAVANDAIAH, Bhaskar PRASAD, Thomas Brezoczky |
2025-07-01 |
| 12266551 |
Apparatus, system, and method for non-contact temperature monitoring of substrate supports |
Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky |
2025-04-01 |
| 12217982 |
Isolated volume seals and method of forming an isolated volume within a processing chamber |
Kirankumar Neelasandra SAVANDAIAH, Nitin Bharadwaj SATYAVOLU, Bhaskar PRASAD, Thomas Brezoczky |
2025-02-04 |
| 12195314 |
Cathode exchange mechanism to improve preventative maintenance time for cluster system |
Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky |
2025-01-14 |
| 12080571 |
Substrate processing module and method of moving a workpiece |
Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky |
2024-09-03 |
| 12043896 |
Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure |
Kirankumar Neelasandra SAVANDAIAH, Nitin Bharadwaj SATYAVOLU, Ganesh Subbuswamy, Devi Raghavee Veerappan, Thomas Brezoczky |
2024-07-23 |
| 12002668 |
Thermal management hardware for uniform temperature control for enhanced bake-out for cluster tool |
Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky, Hari Prasath Rajendran |
2024-06-04 |
| 11955355 |
Isolated volume seals and method of forming an isolated volume within a processing chamber |
Kirankumar Neelasandra SAVANDAIAH, Nitin Bharadwaj SATYAVOLU, Bhaskar PRASAD, Thomas Brezoczky |
2024-04-09 |
| 11817331 |
Substrate holder replacement with protective disk during pasting process |
Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky, Bhaskar PRASAD, Nitin Bharadwaj SATYAVOLU |
2023-11-14 |
| 11749542 |
Apparatus, system, and method for non-contact temperature monitoring of substrate supports |
Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky |
2023-09-05 |
| 11674227 |
Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure |
Kirankumar Neelasandra SAVANDAIAH, Nitin Bharadwaj SATYAVOLU, Ganesh Subbuswamy, Devi Raghavee Veerappan, Thomas Brezoczky |
2023-06-13 |
| 11646217 |
Transfer apparatus and substrate-supporting member |
Anubhav Srivastava, Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky, Lakshmikanth Krishnamurthy SHIRAHATTI |
2023-05-09 |
| 11610799 |
Electrostatic chuck having a heating and chucking capabilities |
Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Nitin Bharadwaj SATYAVOLU, Hari Prasath Rajendran, Lakshmikanth Krishnamurthy SHIRAHATTI +1 more |
2023-03-21 |
| 11600507 |
Pedestal assembly for a substrate processing chamber |
Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Nitin Bharadwaj SATYAVOLU, Thomas Brezoczky |
2023-03-07 |
| D970566 |
Sputter target for a physical vapor deposition chamber |
Martin Lee Riker, William Fruchterman, Ilya Lavitsky, Kirankumar Neelasandra SAVANDAIAH |
2022-11-22 |
| 11492697 |
Apparatus for improved anode-cathode ratio for rf chambers |
Kirankumar Neelasandra SAVANDAIAH, Keith A. Miller, Chandrashekar Kenchappa, Martin Lee Riker |
2022-11-08 |
| D937329 |
Sputter target for a physical vapor deposition chamber |
Martin Lee Riker, William Fruchterman, Ilya Lavitsky, Kirankumar Neelasandra SAVANDAIAH |
2021-11-30 |
| 10998209 |
Substrate processing platforms including multiple processing chambers |
Thomas Brezoczky, Kirankumar Neelasandra SAVANDAIAH |
2021-05-04 |
| 10199204 |
Target retaining apparatus |
Sundarapandian Ramalinga Vijayalakshmi REDDY, Uday Pai, Kirankumar Neelasandra SAVANDAIAH, Thanh X. Nguyen, Muhammad M. Rasheed +1 more |
2019-02-05 |
