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Isolated volume seals and method of forming an isolated volume within a processing chamber |
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| 12100614 |
Apparatus for controlling lift pin movement |
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| 12043896 |
Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure |
Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Ganesh Subbuswamy, Devi Raghavee Veerappan, Thomas Brezoczky |
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| 11955355 |
Isolated volume seals and method of forming an isolated volume within a processing chamber |
Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Bhaskar PRASAD, Thomas Brezoczky |
2024-04-09 |
| 11817331 |
Substrate holder replacement with protective disk during pasting process |
Srinivasa Rao YEDLA, Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky, Bhaskar PRASAD |
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| 11674227 |
Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure |
Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Ganesh Subbuswamy, Devi Raghavee Veerappan, Thomas Brezoczky |
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| 11610799 |
Electrostatic chuck having a heating and chucking capabilities |
Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Hari Prasath Rajendran, Lakshmikanth Krishnamurthy SHIRAHATTI +1 more |
2023-03-21 |
| 11600507 |
Pedestal assembly for a substrate processing chamber |
Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Thomas Brezoczky |
2023-03-07 |
