| 12381101 |
Semiconductor process equipment |
Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky, Lakshmikanth Krishnamurthy SHIRAHATTI |
2025-08-05 |
| 12347719 |
Floating pin for substrate transfer |
Sreenath SOVENAHALLI, Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Thomas Brezoczky |
2025-07-01 |
| 12266551 |
Apparatus, system, and method for non-contact temperature monitoring of substrate supports |
Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky, Srinivasa Rao YEDLA |
2025-04-01 |
| 12217982 |
Isolated volume seals and method of forming an isolated volume within a processing chamber |
Kirankumar Neelasandra SAVANDAIAH, Nitin Bharadwaj SATYAVOLU, Srinivasa Rao YEDLA, Thomas Brezoczky |
2025-02-04 |
| 12195314 |
Cathode exchange mechanism to improve preventative maintenance time for cluster system |
Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky, Srinivasa Rao YEDLA |
2025-01-14 |
| 12100614 |
Apparatus for controlling lift pin movement |
Anubhav Srivastava, Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky, Nitin Bharadwaj SATYAVOLU |
2024-09-24 |
| 11955355 |
Isolated volume seals and method of forming an isolated volume within a processing chamber |
Kirankumar Neelasandra SAVANDAIAH, Nitin Bharadwaj SATYAVOLU, Srinivasa Rao YEDLA, Thomas Brezoczky |
2024-04-09 |
| 11817331 |
Substrate holder replacement with protective disk during pasting process |
Srinivasa Rao YEDLA, Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky, Nitin Bharadwaj SATYAVOLU |
2023-11-14 |
| 11749542 |
Apparatus, system, and method for non-contact temperature monitoring of substrate supports |
Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky, Srinivasa Rao YEDLA |
2023-09-05 |
| 11646217 |
Transfer apparatus and substrate-supporting member |
Anubhav Srivastava, Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky, Srinivasa Rao YEDLA, Lakshmikanth Krishnamurthy SHIRAHATTI |
2023-05-09 |
| 11610799 |
Electrostatic chuck having a heating and chucking capabilities |
Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Nitin Bharadwaj SATYAVOLU, Hari Prasath Rajendran, Lakshmikanth Krishnamurthy SHIRAHATTI +1 more |
2023-03-21 |
| 11600507 |
Pedestal assembly for a substrate processing chamber |
Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Nitin Bharadwaj SATYAVOLU, Thomas Brezoczky |
2023-03-07 |
