Electrostatic chuck having a heating and chucking capabilities

Assignee

• Applied Materials

Inventors

• Bhaskar PRASAD (14 patents)
• Kirankumar Neelasandra SAVANDAIAH (81 patents)
• Srinivasa Rao YEDLA (21 patents)
• Nitin Bharadwaj SATYAVOLU (10 patents)
• Hari Prasath Rajendran (2 patents)
• Lakshmikanth Krishnamurthy SHIRAHATTI (3 patents)
• Thomas Brezoczky (71 patents)

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