Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11950384 | Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers | Akshay Gunaji, Timothy J. Roggenbuck, Sanjeev Baluja, Kalesh Panchaxari Karadi, Tejas Ulavi | 2024-04-02 |
| 11602064 | Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers | Akshay Gunaji, Timothy J. Roggenbuck, Sanjeev Baluja, Kalesh Panchaxari Karadi, Tejas Ulavi | 2023-03-07 |
| 11440159 | Edge load ring | Jeonghoon Oh, Van H. Nguyen | 2022-09-13 |
| 10199204 | Target retaining apparatus | Srinivasa Rao YEDLA, Sundarapandian Ramalinga Vijayalakshmi REDDY, Kirankumar Neelasandra SAVANDAIAH, Thanh X. Nguyen, Muhammad M. Rasheed +1 more | 2019-02-05 |
| 9960021 | Physical vapor deposition (PVD) target having low friction pads | Martin Lee Riker, William Fruchterman, Keith A. Miller, Muhammad M. Rasheed, Thanh X. Nguyen +1 more | 2018-05-01 |
| 9343274 | Process kit shield for plasma enhanced processing chamber | Muhammad M. Rasheed, Donny Young, Kirankumar Neelasandra SAVANDAIAH | 2016-05-17 |
| 9303311 | Substrate processing system with mechanically floating target assembly | Donny Young, Alan A. Ritchie, Muhammad M. Rasheed, Keith A. Miller | 2016-04-05 |
| 8702918 | Apparatus for enabling concentricity of plasma dark space | Alan A. Ritchie, Donny Young, Keith A. Miller, Muhammad M. Rasheed, Steve Sansoni | 2014-04-22 |
| 8647485 | Process kit shield for plasma enhanced processing chamber | Muhammad M. Rasheed, Donny Young, Kirankumar Neelasandra SAVANDAIAH | 2014-02-11 |