Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249494 | Remote plasma cleaning of chambers for electronics manufacturing systems | Yuanhong Guo, Sheng Guo, Marek Radko, Xiaoxiong Yuan, See-Eng Phan +3 more | 2025-03-11 |
| 11854773 | Remote plasma cleaning of chambers for electronics manufacturing systems | Yuanhong Guo, Sheng Guo, Marek Radko, Xiaoxiong Yuan, See-Eng Phan +3 more | 2023-12-26 |
| 10053778 | Cooling pedestal with coating of diamond-like carbon | Vijay D. Parkhe, Kurt J. Ahmann, Matthew Tsai | 2018-08-21 |
| 8852348 | Heat exchange pedestal with coating of diamond-like material | Vijay D. Parkhe, Kurt J. Ahmann, Matthew Tsai | 2014-10-07 |
| 8702918 | Apparatus for enabling concentricity of plasma dark space | Alan A. Ritchie, Donny Young, Keith A. Miller, Muhammad M. Rasheed, Uday Pai | 2014-04-22 |
| 7907384 | Detachable electrostatic chuck for supporting a substrate in a process chamber | Karl M. Brown, Semyon Sherstinsky, Wei Wang, Cheng-Hsiung Tsai, Vineet Haresh Mehta +1 more | 2011-03-15 |
| 7824498 | Coating for reducing contamination of substrates during processing | Vijay D. Parkhe, Kurt J. Ahmann, Matthew Tsai | 2010-11-02 |
| 7697260 | Detachable electrostatic chuck | Karl M. Brown, Nora Arellano, Semyon Sherstinsky, Allen Lau, Cheng-Hsiung Tsai +2 more | 2010-04-13 |
| 7480129 | Detachable electrostatic chuck for supporting a substrate in a process chamber | Karl M. Brown, Semyon Sherstinsky, Wei Wang, Cheng-Hsiung Tsai, Vineet Haresh Mehta +1 more | 2009-01-20 |
| 6395157 | Method and apparatus for sputter etch conditioning a ceramic body | Nitin Khurana, Vince Burkhart, Vijay D. Parkhe, Eugene Tzou | 2002-05-28 |
| 5861086 | Method and apparatus for sputter etch conditioning a ceramic body | Nitin Khurana, Vince Burkhart, Vijay D. Parkhe, Eugene Tzou | 1999-01-19 |