Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249494 | Remote plasma cleaning of chambers for electronics manufacturing systems | Yuanhong Guo, Sheng Guo, Marek Radko, Steve Sansoni, Xiaoxiong Yuan +3 more | 2025-03-11 |
| 11959167 | Selective cobalt deposition on copper surfaces | Sang Ho Yu, Kevin Moraes, Seshadri Ganguli, Hua Chung | 2024-04-16 |
| 11854773 | Remote plasma cleaning of chambers for electronics manufacturing systems | Yuanhong Guo, Sheng Guo, Marek Radko, Steve Sansoni, Xiaoxiong Yuan +3 more | 2023-12-26 |
| 11384429 | Selective cobalt deposition on copper surfaces | Sang Ho Yu, Kevin Moraes, Seshadri Ganguli, Hua Chung | 2022-07-12 |
| 8846163 | Method for removing oxides | Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Joel M. Huston +6 more | 2014-09-30 |
| 8815724 | Process for forming cobalt-containing materials | Seshadri Ganguli, Schubert S. Chu, Mei Chang, Sang Ho Yu, Kevin Moraes | 2014-08-26 |
| 8563424 | Process for forming cobalt and cobalt silicide materials in tungsten contact applications | Seshadri Ganguli, Sang Ho Yu, Mei Chang, Amit Khandelwal, Hyoung-Chan Ha | 2013-10-22 |
| 8187970 | Process for forming cobalt and cobalt silicide materials in tungsten contact applications | Seshadri Ganguli, Sang Ho Yu, Mei Chang, Amit Khandelwal, Hyoung-Chan Ha | 2012-05-29 |
| 8110489 | Process for forming cobalt-containing materials | Seshadri Ganguli, Schubert S. Chu, Mei Chang, Sang Ho Yu, Kevin Moraes | 2012-02-07 |
| 7767024 | Method for front end of line fabrication | Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Joel M. Huston +6 more | 2010-08-03 |
| 7520957 | Lid assembly for front end of line fabrication | Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Joel M. Huston +6 more | 2009-04-21 |
| 7513971 | Flat style coil for improved precision etch uniformity | Karl M. Brown, Vineet Haresh Mehta | 2009-04-07 |
| 7494545 | Epitaxial deposition process and apparatus | Andrew Lam, Yihwan Kim, Satheesh Kuppurao, Xinliang Lu, Chien-Teh Kao | 2009-02-24 |
| 7396480 | Method for front end of line fabrication | Chien-Teh Kao, Jing-Pei (Connie) Chou, Chiukin (Steven) Lai, Sal Umotoy, Joel M. Huston +6 more | 2008-07-08 |
| 7252737 | Pedestal with integral shield | Karl M. Brown, Vineet Haresh Mehta, Semyon Sherstinsky, Allen Lau | 2007-08-07 |
| 6837968 | Lower pedestal shield | Karl M. Brown, Vineet Haresh Mehta, Semyon Sherstinsky, Allen Lau | 2005-01-04 |
| 6726805 | Pedestal with integral shield | Karl M. Brown, Vineet Haresh Mehta, Semyon Sherstinsky, Allen Lau | 2004-04-27 |
| 6652713 | Pedestal with integral shield | Karl M. Brown, Vineet Haresh Mehta, Semyon Sherstinsky, Allen Lau | 2003-11-25 |