| 10927461 |
Gas diffuser support structure for reduced particle generation |
Robin L. Tiner, Lai ZHAO, Soo Young Choi |
2021-02-23 |
| 10923327 |
Chamber liner |
Jianheng Li, Lai ZHAO, Robin L. Tiner, Gaku Furuta, Soo Young Choi |
2021-02-16 |
| 10883174 |
Gas diffuser mounting plate for reduced particle generation |
Hsiang AN, Lai ZHAO, Jianhua Zhou, Robin L. Tiner |
2021-01-05 |
| 9822449 |
Showerhead support structures |
Robin L. Tiner |
2017-11-21 |
| 7907384 |
Detachable electrostatic chuck for supporting a substrate in a process chamber |
Karl M. Brown, Semyon Sherstinsky, Wei Wang, Cheng-Hsiung Tsai, Vineet Haresh Mehta +1 more |
2011-03-15 |
| 7697260 |
Detachable electrostatic chuck |
Karl M. Brown, Nora Arellano, Semyon Sherstinsky, Cheng-Hsiung Tsai, Vineet Haresh Mehta +2 more |
2010-04-13 |
| 7480129 |
Detachable electrostatic chuck for supporting a substrate in a process chamber |
Karl M. Brown, Semyon Sherstinsky, Wei Wang, Cheng-Hsiung Tsai, Vineet Haresh Mehta +1 more |
2009-01-20 |
| 7252737 |
Pedestal with integral shield |
Karl M. Brown, Vineet Haresh Mehta, See-Eng Phan, Semyon Sherstinsky |
2007-08-07 |
| 7148435 |
Build-in LOTO device on equipment breaker panel |
Michael Rosenstein, Carl Johnson, Sharon Niehoff |
2006-12-12 |
| 6837968 |
Lower pedestal shield |
Karl M. Brown, Vineet Haresh Mehta, See-Eng Phan, Semyon Sherstinsky |
2005-01-04 |
| 6827825 |
Method for detecting the position of a shutter disk in a physical vapor deposition chamber |
Michael Feltsman, Michael Rosenstein, Marc Schweitzer |
2004-12-07 |
| 6726805 |
Pedestal with integral shield |
Karl M. Brown, Vineet Haresh Mehta, See-Eng Phan, Semyon Sherstinsky |
2004-04-27 |
| 6669829 |
Shutter disk and blade alignment sensor |
Michael Feltsman, Michael Rosenstein, Marc Schweitzer |
2003-12-30 |
| 6652713 |
Pedestal with integral shield |
Karl M. Brown, Vineet Haresh Mehta, See-Eng Phan, Semyon Sherstinsky |
2003-11-25 |
