| 7907384 |
Detachable electrostatic chuck for supporting a substrate in a process chamber |
Karl M. Brown, Wei Wang, Cheng-Hsiung Tsai, Vineet Haresh Mehta, Allen Lau +1 more |
2011-03-15 |
| 7697260 |
Detachable electrostatic chuck |
Karl M. Brown, Nora Arellano, Allen Lau, Cheng-Hsiung Tsai, Vineet Haresh Mehta +2 more |
2010-04-13 |
| 7480129 |
Detachable electrostatic chuck for supporting a substrate in a process chamber |
Karl M. Brown, Wei Wang, Cheng-Hsiung Tsai, Vineet Haresh Mehta, Allen Lau +1 more |
2009-01-20 |
| 7252737 |
Pedestal with integral shield |
Karl M. Brown, Vineet Haresh Mehta, See-Eng Phan, Allen Lau |
2007-08-07 |
| 7244344 |
Physical vapor deposition plasma reactor with VHF source power applied through the workpiece |
Karl M. Brown, John Pipitone, Vineet Haresh Mehta, Ralf Hofmann, Wei Wang |
2007-07-17 |
| 6837968 |
Lower pedestal shield |
Karl M. Brown, Vineet Haresh Mehta, See-Eng Phan, Allen Lau |
2005-01-04 |
| 6726805 |
Pedestal with integral shield |
Karl M. Brown, Vineet Haresh Mehta, See-Eng Phan, Allen Lau |
2004-04-27 |
| 6652713 |
Pedestal with integral shield |
Karl M. Brown, Vineet Haresh Mehta, See-Eng Phan, Allen Lau |
2003-11-25 |
| 6557248 |
Method of fabricating an electrostatic chuck |
Shamouil Shamouilian, Manoocher Birang, John F. Cameron, Chandra Deshpandey, Alfred Goldspeil +2 more |
2003-05-06 |
| 6464790 |
Substrate support member |
Arnold Kholodenko, Calvin Augason, Samuel Wilson, Michael Stanley Phillips, Leonel A. Zuniga |
2002-10-15 |
| 6464795 |
Substrate support member for a processing chamber |
Calvin Augason, Leonel A. Zuniga, Jun Zhao, Talex Sajoto, Leonid Selyutin +5 more |
2002-10-15 |
| 6350320 |
Heater for processing chamber |
Alison Gilliam, Paul Smith, Leonel A. Zuniga, Ted G. Yoshidome, Nitin Khurana +4 more |
2002-02-26 |
| 6278600 |
Electrostatic chuck with improved temperature control and puncture resistance |
Shamouil Shamouilian, Arnold Kholodenko, Semyon L. Kats, Jon Clinton, Surinder Bedi |
2001-08-21 |
| 6270621 |
Etch chamber |
Simon W. Tam, Mei Chang, Alan F. Morrison, Ashok Sinha |
2001-08-07 |
| 6248176 |
Apparatus and method for delivering a gas |
Joseph Yudovsky, Kenneth Tsai, Steve Ghanayem |
2001-06-19 |
| 6123864 |
Etch chamber |
Simon W. Tam, Mei Chang, Alan F. Morrison, Ashok Sinha |
2000-09-26 |
| 5985033 |
Apparatus and method for delivering a gas |
Joseph Yudovsky, Kenneth Tsai, Steve Ghanayem |
1999-11-16 |
| 5883778 |
Electrostatic chuck with fluid flow regulator |
John F. Cameron, Shamouil Shamouilian, Manoocher Birang, Alfred Mak, Simon W. Tam +1 more |
1999-03-16 |
| 5753132 |
Method of making electrostatic chuck with conformal insulator film |
Shamouil Shamouilian, Sasson Somekh, Hyman J. Levinstein, Manoocher Birang, John F. Cameron |
1998-05-19 |
| 5745331 |
Electrostatic chuck with conformal insulator film |
Shamouil Shamouilian, Sasson Somekh, Hyman J. Levinstein, Manoocher Birang, John F. Cameron |
1998-04-28 |
| 5740009 |
Apparatus for improving wafer and chuck edge protection |
Bryan Pu, Hongching Shan, Kuang-Han Ke, Michael Welch, Alfred Mak +4 more |
1998-04-14 |
| 5673922 |
Apparatus for centering substrates on support members |
Alfred Mak, Leonel A. Zuniga, Ling Chen |
1997-10-07 |
| 5671117 |
Electrostatic chuck |
Shamouil Shamouilian, Manoocher Birang, Alfred Mak, Simon W. Tam |
1997-09-23 |
| 5634266 |
Method of making a dielectric chuck |
Shamouil Shamouilian, Manoocher Birang, Alfred Mak, Simon W. Tam |
1997-06-03 |
| 5421401 |
Compound clamp ring for semiconductor wafers |
Mei Chang, Charles C. Harris, Alan F. Morrison, Virendra V. Rana, James Roberts +2 more |
1995-06-06 |
