Issued Patents All Time
Showing 25 most recent of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9031685 | Atomic layer deposition apparatus | Barry Chin, Lawrence Chung-Lai Lei, Ming Xi, Hua Chung, Ken Kaung Lai +1 more | 2015-05-12 |
| 8626330 | Atomic layer deposition apparatus | Barry Chin, Lawrence Chung-Lai Lei, Ming Xi, Hua Chung, Ken Kaung Lai +1 more | 2014-01-07 |
| 8367565 | Methods and systems of transferring, docking and processing substrates | Lawrence Chung-Lai Lei, Rex Liu, Kon Park, Samuel S. Pak, Tzy-Chung Terry Wu +4 more | 2013-02-05 |
| 8268734 | Methods and systems of transferring, docking and processing substrates | Lawrence Chung-Lai Lei, Rex Liu, Kon Park, Samuel S. Pak, Tzy-Chung Terry Wu +4 more | 2012-09-18 |
| 8123860 | Apparatus for cyclical depositing of thin films | Randhir P. S. Thakur, Ming Xi, Walter Glenn, Ahmad Khan, Ayad A. Al-Shaikh +2 more | 2012-02-28 |
| 8110511 | Methods and systems of transferring a substrate to minimize heat loss | Lawrence Chung-Lai Lei, Rex Liu, Kon Park, Tzy-Chung Terry Wu, Simon Zhu +2 more | 2012-02-07 |
| 8027746 | Atomic layer deposition apparatus | Barry Chin, Lawrence Chung-Lai Lei, Ming Xi, Hua Chung, Ken Kaung Lai +1 more | 2011-09-27 |
| 7897525 | Methods and systems of transferring, docking and processing substrates | Lawrence Chung-Lai Lei, Rex Liu, Kon Park, Samuel S. Pak, Tzy-Chung Terry Wu +4 more | 2011-03-01 |
| 7879151 | Mask etch processing apparatus | Khiem K. Nguyen, Peter Satitpunwaycha | 2011-02-01 |
| 7860597 | Atomic layer deposition apparatus | Barry Chin, Lawrence Chung-Lai Lei, Ming Xi, Hua Chung, Ken Kaung Lai +1 more | 2010-12-28 |
| 7846840 | Method for forming tungsten materials during vapor deposition processes | Moris Kori, Jeong Soo Byun, Lawrence Chung-Lai Lei, Hua Chung | 2010-12-07 |
| 7709385 | Method for depositing tungsten-containing layers by vapor deposition techniques | Ming Xi, Ashok Sinha, Moris Kori, Xinliang Lu, Ken Kaung Lai +1 more | 2010-05-04 |
| 7695563 | Pulsed deposition process for tungsten nucleation | Xinliang Lu, Ping Jian, Jong Hyun Yoo, Ken Kaung Lai, Robert Jackson +1 more | 2010-04-13 |
| 7682984 | Interferometer endpoint monitoring device | Khiem K. Nguyen, Peter Satitpunwaycha | 2010-03-23 |
| 7674715 | Method for forming tungsten materials during vapor deposition processes | Moris Kori, Jeong Soo Byun, Lawrence Chung-Lai Lei, Hua Chung, Ashok Sinha +1 more | 2010-03-09 |
| 7660644 | Atomic layer deposition apparatus | Barry Chin, Lawrence Chung-Lai Lei, Ming Xi, Hua Chung, Ken Kaung Lai +1 more | 2010-02-09 |
| 7605083 | Formation of composite tungsten films | Ken Kaung Lai, Jeong Soo Byun, Frederick Wu, Ramanujapuran A. Srinivas, Avgerinos V. Gelatos +7 more | 2009-10-20 |
| 7501343 | Formation of boride barrier layers using chemisorption techniques | Jeong Soo Byun | 2009-03-10 |
| 7501344 | Formation of boride barrier layers using chemisorption techniques | Jeong Soo Byun | 2009-03-10 |
| 7465666 | Method for forming tungsten materials during vapor deposition processes | Moris Kori, Jeong Soo Byun, Lawrence Chung-Lai Lei, Hua Chung, Ashok Sinha +1 more | 2008-12-16 |
| 7465665 | Method for depositing tungsten-containing layers by vapor deposition techniques | Ming Xi, Ashok Sinha, Moris Kori, Xinliang Lu, Ken Kaung Lai +1 more | 2008-12-16 |
| 7384867 | Formation of composite tungsten films | Ken Kaung Lai, Jeong Soo Byun, Frederick Wu, Ramanujapuran A. Srinivas, Avgerinos V. Gelatos +7 more | 2008-06-10 |
| 7250309 | Integrated phase angle and optical critical dimension measurement metrology for feed forward and feedback process control | Yung-Hee Yvette Lee, Cynthia B. Brooks, Melisa Buie, Turgut Sahin, Jian Ding | 2007-07-31 |
| 7235486 | Method for forming tungsten materials during vapor deposition processes | Moris Kori, Jeong Soo Byun, Lawrence Chung-Lai Lei, Hua Chung, Ashok Sinha +1 more | 2007-06-26 |
| 7220673 | Method for depositing tungsten-containing layers by vapor deposition techniques | Ming Xi, Ashok Sinha, Moris Kori, Xinliang Lu, Ken Kaung Lai +1 more | 2007-05-22 |