Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7371485 | Multi-step process for etching photomasks | Cynthia B. Brooks, Brigitte Stoehr | 2008-05-13 |
| 7250309 | Integrated phase angle and optical critical dimension measurement metrology for feed forward and feedback process control | Alfred Mak, Yung-Hee Yvette Lee, Cynthia B. Brooks, Turgut Sahin, Jian Ding | 2007-07-31 |
| 7115523 | Method and apparatus for etching photomasks | Brigitte Stoehr, Michael Welch | 2006-10-03 |
| 7018934 | Methods and apparatus for etching metal layers on substrates | Brigitte Stoehr | 2006-03-28 |
| 6960413 | Multi-step process for etching photomasks | Cynthia B. Brooks, Brigitte Stoehr | 2005-11-01 |
| 6649075 | Method and apparatus for measuring etch uniformity of a semiconductor wafer | Leonid Poslavsky, Jennifer Leigh Lewis | 2003-11-18 |