Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9556514 | Spatial deposition of material using short-distance reciprocating motions | Jeong Ah Yoon, Suk-Yal Cha, Seung Yeop Baek, Daniel H. Lee, Daniel Yang +1 more | 2017-01-31 |
| 9546423 | Cleaning of deposition device by injecting cleaning gas into deposition device | Sang In Lee, Daniel H. Lee, Hyoseok Daniel Yang | 2017-01-17 |
| 9435030 | Radical reactor with inverted orientation | Daniel H. Lee, Hyoseok Daniel Yang, Sang In Lee | 2016-09-06 |
| 9145608 | Scanning injector assembly module for processing substrate | Sang In Lee, Ilsong Lee, Hyo Seok Yang | 2015-09-29 |
| D732093 | Gas tube assembly | Sang In Lee, Daniel H. Lee, Hyoseok Daniel Yang | 2015-06-16 |
| D732092 | Gas injection plate | Sang In Lee, Daniel H. Lee, Hyoseok Daniel Yang | 2015-06-16 |
| 8367565 | Methods and systems of transferring, docking and processing substrates | Lawrence Chung-Lai Lei, Alfred Mak, Rex Liu, Kon Park, Tzy-Chung Terry Wu +4 more | 2013-02-05 |
| 8268734 | Methods and systems of transferring, docking and processing substrates | Lawrence Chung-Lai Lei, Alfred Mak, Rex Liu, Kon Park, Tzy-Chung Terry Wu +4 more | 2012-09-18 |
| 7897525 | Methods and systems of transferring, docking and processing substrates | Lawrence Chung-Lai Lei, Alfred Mak, Rex Liu, Kon Park, Tzy-Chung Terry Wu +4 more | 2011-03-01 |
| 7628574 | Apparatus and method for processing substrates using one or more vacuum transfer chamber units | Christopher C. Chang | 2009-12-08 |