Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9558963 | Plasma reactor with conductive member in reaction chamber for shielding substrate from undesirable irradiation | Sang In Lee, Hyo Seok Yang | 2017-01-31 |
| 9177788 | Plasma reactor with conductive member in reaction chamber for shielding substrate from undesirable irradiation | Sang In Lee, Hyo Seok Yang | 2015-11-03 |
| 9145608 | Scanning injector assembly module for processing substrate | Samuel S. Pak, Sang In Lee, Hyo Seok Yang | 2015-09-29 |