Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9546423 | Cleaning of deposition device by injecting cleaning gas into deposition device | Sang In Lee, Samuel S. Pak, Daniel H. Lee | 2017-01-17 |
| 9435030 | Radical reactor with inverted orientation | Daniel H. Lee, Samuel S. Pak, Sang In Lee | 2016-09-06 |
| 9423357 | Oblique illuminator for inspecting manufactured substrates | Shiyu Zhang, Charles N. Wang, Yevgeniy Churin, Yong-Mo Moon, Mark Wang | 2016-08-23 |
| D732092 | Gas injection plate | Samuel S. Pak, Sang In Lee, Daniel H. Lee | 2015-06-16 |
| D732093 | Gas tube assembly | Samuel S. Pak, Sang In Lee, Daniel H. Lee | 2015-06-16 |
| 8794801 | Oblique illuminator for inspecting manufactured substrates | Shiyu Zhang, Charles N. Wang, Yevgeniy Churin, Yong-Mo Moon, Mark Wang | 2014-08-05 |