| 9577140 |
Low-cost solar cell metallization over TCO and methods of their fabrication |
Roman Milter, Robert Broesler |
2017-02-21 |
|
| 9550120 |
Toll image review gamification |
Charles F. Mitchell, Dennis G. Moore, Michael Sinha, Stephen Bliss |
2017-01-24 |
$10,736,000 |
| 8796066 |
Low-cost solar cells and methods for fabricating low cost substrates for solar cells |
Wen Ma |
2014-08-05 |
|
| 8236706 |
Method and apparatus for growing thin oxide films on silicon while minimizing impact on existing structures |
Bruce W. Peuse, Yaozhi Hu, Paul Janis Timans, Guangcai Xing, Wilfried Lerch +4 more |
2012-08-07 |
$830,000 |
| 8084683 |
Low-cost multi-junction solar cells and methods for their production |
— |
2011-12-27 |
|
| 8083963 |
Removal of process residues on the backside of a substrate |
Gerardo Delgadino, Indrajit Lahiri, Teh-Tien Su, Sy-Yuan Brian Shieh |
2011-12-27 |
$8,284,000 |
| 8048806 |
Methods to avoid unstable plasma states during a process transition |
Michael Kutney, Daniel J. Hoffman, Gerardo Delgadino, Ezra Robert Gold, Xiaoye Zhao +2 more |
2011-11-01 |
$26,300,000 |
| 7960644 |
Low-cost multi-junction solar cells and methods for their production |
— |
2011-06-14 |
|
| 7956283 |
Low-cost solar cells and methods for their production |
— |
2011-06-07 |
|
| 7951640 |
Low-cost multi-junction solar cells and methods for their production |
— |
2011-05-31 |
|
| 7709385 |
Method for depositing tungsten-containing layers by vapor deposition techniques |
Ming Xi, Moris Kori, Alfred Mak, Xinliang Lu, Ken Kaung Lai +1 more |
2010-05-04 |
$14,487,000 |
| 7674715 |
Method for forming tungsten materials during vapor deposition processes |
Moris Kori, Alfred Mak, Jeong Soo Byun, Lawrence Chung-Lai Lei, Hua Chung +1 more |
2010-03-09 |
$8,227,000 |
| 7605083 |
Formation of composite tungsten films |
Ken Kaung Lai, Jeong Soo Byun, Frederick Wu, Ramanujapuran A. Srinivas, Avgerinos V. Gelatos +7 more |
2009-10-20 |
$54,871,000 |
| 7497932 |
Electro-chemical deposition system |
Mark Cassidy Cridlin Lloyd, Donald Olgado, Ratson Morad, Peter Hey, Mark Denome +10 more |
2009-03-03 |
$11,197,000 |
| 7465665 |
Method for depositing tungsten-containing layers by vapor deposition techniques |
Ming Xi, Moris Kori, Alfred Mak, Xinliang Lu, Ken Kaung Lai +1 more |
2008-12-16 |
$10,817,000 |
| 7465666 |
Method for forming tungsten materials during vapor deposition processes |
Moris Kori, Alfred Mak, Jeong Soo Byun, Lawrence Chung-Lai Lei, Hua Chung +1 more |
2008-12-16 |
$10,817,000 |
| 7384867 |
Formation of composite tungsten films |
Ken Kaung Lai, Jeong Soo Byun, Frederick Wu, Ramanujapuran A. Srinivas, Avgerinos V. Gelatos +7 more |
2008-06-10 |
$47,143,000 |
| 7312146 |
Semiconductor device interconnect fabricating techniques |
Robin Cheung |
2007-12-25 |
|
| 7276447 |
Plasma dielectric etch process including ex-situ backside polymer removal for low-dielectric constant material |
Gerardo Delgadino, Indrajit Lahiri, Teh-Tien Su, Brian Sy-Yuan Sheih |
2007-10-02 |
$69,542,000 |
| 7235486 |
Method for forming tungsten materials during vapor deposition processes |
Moris Kori, Alfred Mak, Jeong Soo Byun, Lawrence Chung-Lai Lei, Hua Chung +1 more |
2007-06-26 |
$17,529,000 |
| 7220673 |
Method for depositing tungsten-containing layers by vapor deposition techniques |
Ming Xi, Moris Kori, Alfred Mak, Xinliang Lu, Ken Kaung Lai +1 more |
2007-05-22 |
$20,378,000 |
| 7151053 |
Method of depositing dielectric materials including oxygen-doped silicon carbide in damascene applications |
Ju-Hyung Lee, Ping Xu, Shankar Venkataraman, Li-Qun Xia, Fei Han +5 more |
2006-12-19 |
$47,258,000 |
| 7115494 |
Method and system for controlling the presence of fluorine in refractory metal layers |
Ming Xi, Moris Kori, Alfred Mak, Jeong Soo Byun, Lawrence Chung-Lai Lei +1 more |
2006-10-03 |
$12,847,000 |
| 7101795 |
Method and apparatus for depositing refractory metal layers employing sequential deposition techniques to form a nucleation layer |
Ming Xi, Moris Kori, Alfred Mak, Xinliang Lu, Ken Kaung Lai +1 more |
2006-09-05 |
$12,664,000 |
| 7033922 |
Method and system for controlling the presence of fluorine in refractory metal layers |
Moris Kori, Alfred Mak, Jeong Soo Byun, Lawrence Chung-Lai Lei, Hua Chung +1 more |
2006-04-25 |
$23,796,000 |
