Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7276447 | Plasma dielectric etch process including ex-situ backside polymer removal for low-dielectric constant material | Gerardo Delgadino, Indrajit Lahiri, Teh-Tien Su, Ashok Sinha | 2007-10-02 |