Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069535 | Atomic layer etch of tungsten for enhanced tungsten deposition fill | Chiukin Steven Lai, Keren Jacobs Kanarik, Samantha Tan, Anand Chandrashekar, Wenbing Yang +2 more | 2021-07-20 |
| 9972504 | Atomic layer etching of tungsten for enhanced tungsten deposition fill | Chiukin Steven Lai, Keren Jacobs Kanarik, Samantha Tan, Anand Chandrashekar, Wenbing Yang +2 more | 2018-05-15 |
| 8083963 | Removal of process residues on the backside of a substrate | Gerardo Delgadino, Indrajit Lahiri, Sy-Yuan Brian Shieh, Ashok Sinha | 2011-12-27 |
| 7276447 | Plasma dielectric etch process including ex-situ backside polymer removal for low-dielectric constant material | Gerardo Delgadino, Indrajit Lahiri, Brian Sy-Yuan Sheih, Ashok Sinha | 2007-10-02 |