Chiukin Steven Lai — 14 Patents at Lam Research

Chiukin Steven Lai has been granted 14 US patents while listed as an inventor at Lam Research. The first was granted in 2011 and the most recent in June 2025. Chiukin Steven Lai ranks #332,869 of 4,157,543 US inventors in our database (top 8.0%). Patent records list Chiukin Steven Lai in Sunnyvale, CA, US.

Patents per Year

Issued Patents All Time

Showing 1–14 of 14 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
12334351	Molybdenum deposition	Jeong-Seok Na, Yao-Tsung HSIEH, Patrick A. Van Cleemput	2025-06-17
11069535	Atomic layer etch of tungsten for enhanced tungsten deposition fill	Keren Jacobs Kanarik, Samantha Tan, Anand Chandrashekar, Teh-Tien Su, Wenbing Yang +2 more	2021-07-20	$260,622,000
10777453	Low resistivity films containing molybdenum	Shruti Vivek Thombare, Raashina Humayun, Michal Danek, Joshua Collins, Hanna Bamnolker +3 more	2020-09-15	$89,396,000
10731250	Depositing ruthenium layers in interconnect metallization	Do-Young Kim, Jeong-Seok Na, Raashina Humayun, Michal Danek	2020-08-04	$173,102,000
10510590	Low resistivity films containing molybdenum	Shruti Vivek Thombare, Raashina Humayun, Michal Danek, Joshua Collins, Hanna Bamnolker +3 more	2019-12-17	$47,535,000
10438847	Manganese barrier and adhesion layers for cobalt	Jeong-Seok Na, Raashina Humayun, Michal Danek, Kaihan Ashtiani	2019-10-08	$41,062,000
10283404	Selective deposition of WCN barrier/adhesion layer for interconnect	Jeong-Seok Na, Megha Rathod, Raashina Humayun	2019-05-07	$75,022,000
10229826	Systems and methods for forming low resistivity metal contacts and interconnects by reducing and removing metallic oxide	Raihan M. Tarafdar, Shruti Vivek Thombare, Jeong-Seok Na, Raashina Humayun	2019-03-12	$69,931,000
9972504	Atomic layer etching of tungsten for enhanced tungsten deposition fill	Keren Jacobs Kanarik, Samantha Tan, Anand Chandrashekar, Teh-Tien Su, Wenbing Yang +2 more	2018-05-15	$34,519,000
9748137	Method for void-free cobalt gap fill	Jeong-Seok Na, Raihan M. Tarafdar, Raashina Humayun, Michal Danek	2017-08-29	$36,306,000
9362163	Methods and apparatuses for atomic layer cleaning of contacts and vias	Michal Danek, Juwen Gao, Aaron R. Fellis, Francisco Juarez	2016-06-07	$22,992,000
8617348	Modulating etch selectivity and etch rate of silicon nitride thin films	Xinye Liu	2013-12-31
8187486	Modulating etch selectivity and etch rate of silicon nitride thin films	Xinye Liu	2012-05-29	$11,343,000
7977249	Methods for removing silicon nitride and other materials during fabrication of contacts	Xinye Liu, Yu-Chi Yang	2011-07-12	$14,678,000