Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334351 | Molybdenum deposition | Yao-Tsung HSIEH, Chiukin Steven Lai, Patrick A. Van Cleemput | 2025-06-17 |
| 10731250 | Depositing ruthenium layers in interconnect metallization | Do-Young Kim, Chiukin Steven Lai, Raashina Humayun, Michal Danek | 2020-08-04 |
| 10438847 | Manganese barrier and adhesion layers for cobalt | Chiukin Steven Lai, Raashina Humayun, Michal Danek, Kaihan Ashtiani | 2019-10-08 |
| 10283404 | Selective deposition of WCN barrier/adhesion layer for interconnect | Megha Rathod, Chiukin Steven Lai, Raashina Humayun | 2019-05-07 |
| 10242879 | Methods and apparatus for forming smooth and conformal cobalt film by atomic layer deposition | Raashina Humayun | 2019-03-26 |
| 10229826 | Systems and methods for forming low resistivity metal contacts and interconnects by reducing and removing metallic oxide | Raihan M. Tarafdar, Shruti Vivek Thombare, Raashina Humayun, Chiukin Steven Lai | 2019-03-12 |
| 9748137 | Method for void-free cobalt gap fill | Chiukin Steven Lai, Raihan M. Tarafdar, Raashina Humayun, Michal Danek | 2017-08-29 |
| 9349637 | Method for void-free cobalt gap fill | Tianhua Yu, Michal Danek, Sanjay Gopinath | 2016-05-24 |
| 9255326 | Systems and methods for remote plasma atomic layer deposition | Sanjay Gopinath | 2016-02-09 |
| 8747964 | Ion-induced atomic layer deposition of tantalum | Kie Jin Park, Victor Lu | 2014-06-10 |
| 7112456 | Vertical GaN light emitting diode and method for manufacturing the same | Young Ho Park, Hun Joo Hahm, Seung Jin Yoo | 2006-09-26 |
| 7091055 | White light emitting diode and method for manufacturing the same | Hun Joo Hahm, In Eung Kim, Seung Jin Yoo, Young Ho Park, Soo Min Lee | 2006-08-15 |
| 6914262 | White light emitting diode and method for manufacturing the same | Hun Joo Hahm, In Eung Kim, Seung Jin Yoo, Young Ho Park, Soo Min Lee | 2005-07-05 |
| 6902989 | Method for manufacturing gallium nitride (GaN) based single crystalline substrate that include separating from a growth substrate | Seung Jin Yoo, Young Ho Park | 2005-06-07 |
| 6818531 | Method for manufacturing vertical GaN light emitting diodes | Seung Jin Yoo, In Eung Kim, Hun Joo Hahm, Young Ho Park | 2004-11-16 |