Issued Patents All Time
Showing 1–25 of 92 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362188 | Method for preventing line bending during metal fill process | Adam Jandl, Sema Ermez, Lawrence Schloss, Sanjay Gopinath, Siew Neo +2 more | 2025-07-15 |
| 12331396 | Systems and methods for homogenous intermixing of precursors in alloy atomic layer deposition | Ilanit Fisher, Raashina Humayun, Patrick A. Van Cleemput, Shruti Vivek Thombare | 2025-06-17 |
| 12237221 | Nucleation-free tungsten deposition | Sema Ermez, Ruopeng Deng, Yutaka Nishioka, Xiaolan Ba, Sanjay Gopinath | 2025-02-25 |
| 12203168 | Metal deposition | Ravi Vellanki, Eric H. Lenz, Vinayakaraddy Gulabal, Sanjay Gopinath, Prodyut Majumder +5 more | 2025-01-21 |
| 12148623 | Deposition of tungsten on molybdenum templates | Patrick A. Van Cleemput, Shruti Vivek Thombare | 2024-11-19 |
| 12074029 | Molybdenum deposition | Patrick A. Van Cleemput, Shruti Vivek Thombare | 2024-08-27 |
| 11901227 | Feature fill with nucleation inhibition | Anand Chandrashekar, Esther Jeng, Raashina Humayun, Juwen Gao, Deqi Wang | 2024-02-13 |
| 11836429 | Determination of recipes for manufacturing semiconductor devices | Kapil Sawlani, Atashi Basu, David M. Fried, Emily Ann Alden | 2023-12-05 |
| 11827976 | Systems and methods for homogenous intermixing of precursors in alloy atomic layer deposition | Ilanit Fisher, Raashina Humayun, Patrick A. Van Cleemput, Shruti Vivek Thombare | 2023-11-28 |
| 11410883 | Tungsten feature fill with nucleation inhibition | Anand Chandrashekar, Esther Jeng, Raashina Humayun, Juwen Gao, Deqi Wang | 2022-08-09 |
| 11355345 | Method for preventing line bending during metal fill process | Adam Jandl, Sema Ermez, Lawrence Schloss, Sanjay Gopinath, Siew Neo +2 more | 2022-06-07 |
| 11348795 | Metal fill process for three-dimensional vertical NAND wordline | Lawrence Schloss, Raashina Humayun, Sanjay Gopinath, Juwen Gao, Kaihan Ashtiani | 2022-05-31 |
| 11263737 | Defect classification and source analysis for semiconductor equipment | Kapil Sawlani, Richard A. Gottscho, Keith Wells, Keith J. Hansen | 2022-03-01 |
| 11075115 | Tungsten feature fill | Anand Chandrashekar, Esther Jeng, Raashina Humayun, Juwen Gao, Deqi Wang | 2021-07-27 |
| 11069535 | Atomic layer etch of tungsten for enhanced tungsten deposition fill | Chiukin Steven Lai, Keren Jacobs Kanarik, Samantha Tan, Anand Chandrashekar, Teh-Tien Su +2 more | 2021-07-20 |
| 10977405 | Fill process optimization using feature scale modeling | Michael J. Bowes, Atashi Basu, Kapil Sawlani, Dongyao Li, Anand Chandrashekar +1 more | 2021-04-13 |
| 10916434 | Feature fill with multi-stage nucleation inhibition | Deqi Wang, Anand Chandrashekar, Raashina Humayun | 2021-02-09 |
| 10895539 | In-situ chamber clean end point detection systems and methods using computer vision systems | Kapil Sawlani, Gary Lind, Ronald Powell, Michael Rumer, Kaihan Ashtiani | 2021-01-19 |
| 10777453 | Low resistivity films containing molybdenum | Shruti Vivek Thombare, Raashina Humayun, Chiukin Steven Lai, Joshua Collins, Hanna Bamnolker +3 more | 2020-09-15 |
| 10731250 | Depositing ruthenium layers in interconnect metallization | Do-Young Kim, Jeong-Seok Na, Chiukin Steven Lai, Raashina Humayun | 2020-08-04 |
| 10580695 | Feature fill with nucleation inhibition | Anand Chandrashekar, Esther Jeng, Raashina Humayun, Juwen Gao, Deqi Wang | 2020-03-03 |
| 10580654 | Feature fill with multi-stage nucleation inhibition | Deqi Wang, Anand Chandrashekar, Raashina Humayun | 2020-03-03 |
| 10573522 | Method for preventing line bending during metal fill process | Adam Jandl, Sema Ermez, Lawrence Schloss, Sanjay Gopinath, Siew Neo +2 more | 2020-02-25 |
| 10546751 | Forming low resistivity fluorine free tungsten film without nucleation | Hanna Bamnolker, Joshua Collins, Tomas Sadilek, Hyeong Seop Shin, Xiaolan Ba +2 more | 2020-01-28 |
| 10529722 | Tungsten for wordline applications | Hanna Bamnolker, Raashina Humayun, Juwen Gao | 2020-01-07 |