| 11901227 |
Feature fill with nucleation inhibition |
Anand Chandrashekar, Esther Jeng, Raashina Humayun, Michal Danek, Juwen Gao |
2024-02-13 |
| 11532685 |
Doubled-side display device and manufacturing method thereof |
— |
2022-12-20 |
| 11410883 |
Tungsten feature fill with nucleation inhibition |
Anand Chandrashekar, Esther Jeng, Raashina Humayun, Michal Danek, Juwen Gao |
2022-08-09 |
| 11315983 |
Display panel including multiple pixel units and display device |
— |
2022-04-26 |
| 11075115 |
Tungsten feature fill |
Anand Chandrashekar, Esther Jeng, Raashina Humayun, Michal Danek, Juwen Gao |
2021-07-27 |
| 10916434 |
Feature fill with multi-stage nucleation inhibition |
Anand Chandrashekar, Raashina Humayun, Michal Danek |
2021-02-09 |
| 10580654 |
Feature fill with multi-stage nucleation inhibition |
Anand Chandrashekar, Raashina Humayun, Michal Danek |
2020-03-03 |
| 10580695 |
Feature fill with nucleation inhibition |
Anand Chandrashekar, Esther Jeng, Raashina Humayun, Michal Danek, Juwen Gao |
2020-03-03 |
| 10256142 |
Tungsten feature fill with nucleation inhibition |
Anand Chandrashekar, Esther Jeng, Raashina Humayun, Michal Danek, Juwen Gao |
2019-04-09 |
| 10211099 |
Chamber conditioning for remote plasma process |
Gang Liu, Anand Chandrashekar, Tsung-Han Yang, John W. Griswold |
2019-02-19 |
| 10170320 |
Feature fill with multi-stage nucleation inhibition |
Anand Chandrashekar, Raashina Humayun, Michal Danek |
2019-01-01 |
| 10103058 |
Tungsten feature fill |
Anand Chandrashekar, Esther Jeng, Raashina Humayun, Michal Danek, Juwen Gao |
2018-10-16 |
| 9997405 |
Feature fill with nucleation inhibition |
Anand Chandrashekar, Esther Jeng, Raashina Humayun, Michal Danek, Juwen Gao |
2018-06-12 |
| 9653353 |
Tungsten feature fill |
Anand Chandrashekar, Esther Jeng, Raashina Humayun, Michal Danek, Juwen Gao |
2017-05-16 |
| 9589808 |
Method for depositing extremely low resistivity tungsten |
Hanna Bamnolker, Raashina Humayun, Yan Guan |
2017-03-07 |
| 9240347 |
Tungsten feature fill |
Anand Chandrashekar, Esther Jeng, Raashina Humayun, Michal Danek, Juwen Gao |
2016-01-19 |
| 9034760 |
Methods of forming tensile tungsten films and compressive tungsten films |
Feng Chen, Tsung-Han Yang, Juwen Gao, Roey Shaviv, Raashina Humayun |
2015-05-19 |
| 8853080 |
Method for depositing tungsten film with low roughness and low resistivity |
Yan Guan, Abhishek Manohar, Feng Chen, Raashina Humayun |
2014-10-07 |
