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Low temperature tungsten film deposition for small critical dimension contacts and interconnects |
Raashina Humayun, Michal Danek, Anand Chandrashekar |
2017-06-06 |
| 9236297 |
Low tempature tungsten film deposition for small critical dimension contacts and interconnects |
Raashina Humayun, Michal Danek, Anand Chandrashekar |
2016-01-12 |
| 9034760 |
Methods of forming tensile tungsten films and compressive tungsten films |
Tsung-Han Yang, Juwen Gao, Roey Shaviv, Raashina Humayun, Deqi Wang |
2015-05-19 |
| 8975184 |
Methods of improving tungsten contact resistance in small critical dimension features |
Tsung-Han Yang, Juwen Gao, Michal Danek |
2015-03-10 |
| 8853080 |
Method for depositing tungsten film with low roughness and low resistivity |
Yan Guan, Abhishek Manohar, Deqi Wang, Raashina Humayun |
2014-10-07 |
| 8623733 |
Methods for depositing ultra thin low resistivity tungsten film for small critical dimension contacts and interconnects |
Raashina Humayun, Michal Danek, Anand Chandrashekar |
2014-01-07 |
| 8551885 |
Method for reducing tungsten roughness and improving reflectivity |
Raashina Humayun, Abhishek Manohar |
2013-10-08 |
| 8409987 |
Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics |
Anand Chandrashekar, Mirko Glass, Raashina Humayun, Michal Danek, Kaihan Ashtiani +2 more |
2013-04-02 |
| 8329576 |
Method for improving uniformity and adhesion of low resistivity tungsten film |
Lana Hiului Chan, Karl B. Levy |
2012-12-11 |
| 8058170 |
Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics |
Anand Chandrashekar, Mirko Glass, Raashina Humayun, Michael Danek, Kaihan Ashtiani +2 more |
2011-11-15 |
| 7772114 |
Method for improving uniformity and adhesion of low resistivity tungsten film |
Lana Hiului Chan, Karl B. Levy |
2010-08-10 |
| 7611969 |
Generation and applications of negative dielectric constant materials |
Ching-Wu Chu, Yu-Yi Xue, Jason Shulman, Stephen Tsui |
2009-11-03 |