Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8409987 | Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics | Anand Chandrashekar, Raashina Humayun, Michal Danek, Kaihan Ashtiani, Feng Chen +2 more | 2013-04-02 |
| 8058170 | Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics | Anand Chandrashekar, Raashina Humayun, Michael Danek, Kaihan Ashtiani, Feng Chen +2 more | 2011-11-15 |