Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8409985 | Methods for growing low-resistivity tungsten for high aspect ratio and small features | Kaihan Ashtiani, Joshua Collins | 2013-04-02 |
| 8409987 | Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics | Anand Chandrashekar, Mirko Glass, Raashina Humayun, Michal Danek, Kaihan Ashtiani +2 more | 2013-04-02 |
| 8329576 | Method for improving uniformity and adhesion of low resistivity tungsten film | Feng Chen, Karl B. Levy | 2012-12-11 |
| 8101521 | Methods for improving uniformity and resistivity of thin tungsten films | Juwen Gao, Panya Wongsenakhum | 2012-01-24 |
| 8058170 | Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristics | Anand Chandrashekar, Mirko Glass, Raashina Humayun, Michael Danek, Kaihan Ashtiani +2 more | 2011-11-15 |
| 8048805 | Methods for growing low-resistivity tungsten film | Panya Wongsenakhum, Joshua Collins | 2011-11-01 |
| 7955972 | Methods for growing low-resistivity tungsten for high aspect ratio and small features | Kaihan Ashtiani, Joshua Collins | 2011-06-07 |
| 7772114 | Method for improving uniformity and adhesion of low resistivity tungsten film | Feng Chen, Karl B. Levy | 2010-08-10 |
| 7655567 | Methods for improving uniformity and resistivity of thin tungsten films | Juwen Gao, Panya Wongsenakhum | 2010-02-02 |
| 7589017 | Methods for growing low-resistivity tungsten film | Panya Wongsenakhum, Joshua Collins | 2009-09-15 |
| 7262125 | Method of forming low-resistivity tungsten interconnects | Panya Wongsenakhum, Aaron R. Fellis, Kaihan Ashtiani, Karl B. Levy, Juwen Gao +2 more | 2007-08-28 |
| 7141494 | Method for reducing tungsten film roughness and improving step coverage | Sang-Hyeob Lee, Karl B. Levy, Aaron R. Fellis, Panya Wongsenakhum, Juwen Gao +3 more | 2006-11-28 |