Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12227842 | Vapor accumulator for corrosive gases with purging | Gary Lind, Joshua Collins, Harald te Nijenhuis | 2025-02-18 |
| 10872787 | Apparatus for purging semiconductor process chamber slit valve opening | Peter Krotov | 2020-12-22 |
| 10132413 | Gas inlet valve with incompatible materials isolation | Gary Lind | 2018-11-20 |
| 10113232 | Azimuthal mixer | Mohamed Shihaam Suhail, Ravi Bharatkumar Parmar, David Cohen | 2018-10-30 |
| 10090174 | Apparatus for purging semiconductor process chamber slit valve opening | Peter Krotov | 2018-10-02 |
| 9918376 | Hybrid impedance matching for inductively coupled plasma system | George Thomas, Francisco Juarez | 2018-03-13 |
| 9082589 | Hybrid impedance matching for inductively coupled plasma system | George Thomas, Francisco Juarez | 2015-07-14 |
| 8262800 | Methods and apparatus for cleaning deposition reactors | Abhishek Manohar | 2012-09-11 |
| 8101521 | Methods for improving uniformity and resistivity of thin tungsten films | Juwen Gao, Lana Hiului Chan | 2012-01-24 |
| 8048805 | Methods for growing low-resistivity tungsten film | Lana Hiului Chan, Joshua Collins | 2011-11-01 |
| 7754604 | Reducing silicon attack and improving resistivity of tungsten nitride film | Juwen Gao, Joshua Collins | 2010-07-13 |
| 7655567 | Methods for improving uniformity and resistivity of thin tungsten films | Juwen Gao, Lana Hiului Chan | 2010-02-02 |
| 7589017 | Methods for growing low-resistivity tungsten film | Lana Hiului Chan, Joshua Collins | 2009-09-15 |
| 7262125 | Method of forming low-resistivity tungsten interconnects | Aaron R. Fellis, Kaihan Ashtiani, Karl B. Levy, Juwen Gao, Joshua Collins +2 more | 2007-08-28 |
| 7141494 | Method for reducing tungsten film roughness and improving step coverage | Sang-Hyeob Lee, Karl B. Levy, Aaron R. Fellis, Juwen Gao, Joshua Collins +3 more | 2006-11-28 |
| 6692575 | Apparatus for supporting a substrate in a reaction chamber | Thomas R. Omstead, William Messner, Edward J. Nagy, William Starks, Mehrdad M. Moslehi | 2004-02-17 |
| 6544341 | System for fabricating a device on a substrate with a process gas | Thomas R. Omstead, William Messner, Edward J. Nagy, William Starks, Mehrdad M. Moslehi | 2003-04-08 |
| 6508197 | Apparatus for dispensing gas for fabricating substrates | Thomas R. Omstead, William Messner, Edward J. Nagy, William Starks, Mehrdad M. Moslehi | 2003-01-21 |
| 6274495 | Method for fabricating a device on a substrate | Thomas R. Omstead, William Messner, Edward J. Nagy, William Starks, Mehrdad M. Moslehi | 2001-08-14 |
| 6190732 | Method and system for dispensing process gas for fabricating a device on a substrate | Thomas R. Omstead, William Messner, Edward J. Nagy, William Starks, Mehrdad M. Moslehi | 2001-02-20 |