Issued Patents All Time
Showing 1–25 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11031247 | Method and apparatus for depositing a monolayer on a three dimensional structure | — | 2021-06-08 |
| 10930846 | Methods of forming silicon-containing dielectric materials and methods of forming a semiconductor device comprising nitrogen radicals and oxygen-containing, silicon-containing, or carbon-containing precursors | Cole S. Franklin | 2021-02-23 |
| 10468595 | Semiconductor device structures including silicon-containing dielectric materials | Cole S. Franklin | 2019-11-05 |
| 10436717 | Compositional optical emission spectroscopy for detection of particle induced arcs in a fabrication process | Ke-Hung Chen, Deepak Vedhachalam | 2019-10-08 |
| 10121966 | Semiconductor device structures including silicon-containing dielectric materials | Cole S. Franklin | 2018-11-06 |
| 9929015 | High efficiency apparatus and method for depositing a layer on a three dimensional structure | Simon Ruffell, Tristan Y. Ma, Ethan A. Wright, John Hautala | 2018-03-27 |
| 9847228 | Method for selectively depositing a layer on a three dimensional structure | Simon Ruffell, Anthony Renau | 2017-12-19 |
| 9460961 | Techniques and apparatus for anisotropic metal etching | Tristan Y. Ma, Ludovic Godet | 2016-10-04 |
| 9453279 | Method for selectively depositing a layer on a three dimensional structure | Simon Ruffell, Anthony Renau | 2016-09-27 |
| 9435038 | Ion implant assisted metal etching | William Davis Lee, Tristan Y. Ma | 2016-09-06 |
| 9396965 | Techniques and apparatus for anisotropic metal etching | Tristan Y. Ma, Ludovic Godet | 2016-07-19 |
| 9343317 | Methods of forming silicon-containing dielectric materials and semiconductor device structures | Cole S. Franklin | 2016-05-17 |
| 8211593 | Low platinum fuel cells, catalysts, and method for preparing the same | Tao Gu, Ning Wang, Yi Dong, Yi-Qun Li | 2012-07-03 |
| 7059070 | Footwear containing improved audio/visual displays | Alina Gover | 2006-06-13 |
| 7037574 | Atomic layer deposition for fabricating thin films | Ajit Paranjpe, Sanjay Gopinath, Randhir Bubber, Ming Mao | 2006-05-02 |
| 6902620 | Atomic layer deposition systems and methods | Karl B. Levy | 2005-06-07 |
| 6713373 | Method for obtaining adhesion for device manufacture | — | 2004-03-30 |
| 6692575 | Apparatus for supporting a substrate in a reaction chamber | Panya Wongsenakhum, William Messner, Edward J. Nagy, William Starks, Mehrdad M. Moslehi | 2004-02-17 |
| 6645847 | Microelectronic interconnect material with adhesion promotion layer and fabrication method | Ajit Paranjpe, Mehrdad M. Moslehi, Boris Relja, Randhir Bubber, Lino Velo +3 more | 2003-11-11 |
| 6627995 | Microelectronic interconnect material with adhesion promotion layer and fabrication method | Ajit Paranjpe, Mehrdad M. Moslehi, Boris Relja, Randhir Bubber, Lino Velo +3 more | 2003-09-30 |
| 6544341 | System for fabricating a device on a substrate with a process gas | Panya Wongsenakhum, William Messner, Edward J. Nagy, William Starks, Mehrdad M. Moslehi | 2003-04-08 |
| 6508197 | Apparatus for dispensing gas for fabricating substrates | Panya Wongsenakhum, William Messner, Edward J. Nagy, William Starks, Mehrdad M. Moslehi | 2003-01-21 |
| 6461675 | Method for forming a copper film on a substrate | Ajit Paranjpe, Mehrdad M. Moslehi, Lino Velo, David Campbell, Zeming Liu +1 more | 2002-10-08 |
| 6444263 | Method of chemical-vapor deposition of a material | Ajit Paranjpe, Randhir Bubber, Sanjay Gopinath, Mehrdad M. Moslehi | 2002-09-03 |
| 6365502 | Microelectronic interconnect material with adhesion promotion layer and fabrication method | Ajit Paranjpe, Mehrdad M. Moslehi, Boris Relja, Randhir Bubber, Lino Velo +3 more | 2002-04-02 |