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Method and apparatus for fabricating a conformal thin film on a substrate |
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2006-07-04 |
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Atomic layer deposition for fabricating thin films |
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2006-05-02 |
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Method for fabricating a semiconductor chip interconnect |
Ajit Paranjpe, Mehrdad M. Moslehi, Lino Velo |
2004-11-02 |
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Microelectronic interconnect material with adhesion promotion layer and fabrication method |
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2003-11-11 |
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Microelectronic interconnect material with adhesion promotion layer and fabrication method |
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2003-09-30 |
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Method of chemical-vapor deposition of a material |
Ajit Paranjpe, Sanjay Gopinath, Thomas R. Omstead, Mehrdad M. Moslehi |
2002-09-03 |
| 6365502 |
Microelectronic interconnect material with adhesion promotion layer and fabrication method |
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2002-04-02 |
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Semiconductor chip interconnect barrier material and fabrication method |
Ajit Paranjpe, Mehrdad M. Moslehi, Lino Velo |
2001-09-25 |
| 6204204 |
Method and apparatus for depositing tantalum-based thin films with organmetallic precursor |
Ajit Paranjpe, Mehrdad M. Moslehi, Lino Velo |
2001-03-20 |