Issued Patents All Time
Showing 25 most recent of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12104242 | Deposition system with integrated carrier cleaning modules | Alexander I. Gurary, Mandar Deshpande | 2024-10-01 |
| 10985046 | Micro-LED transfer methods using light-based debonding | Christopher Morath | 2021-04-20 |
| 10167554 | Wafer processing with carrier extension | Bojan Mitrovic, Guanghua Wei, Eric A. Armour | 2019-01-01 |
| 9938621 | Methods of wafer processing with carrier extension | Bojan Mitrovic, Guanghua Wei, Eric A. Armour | 2018-04-10 |
| 9761671 | Engineered substrates for use in crystalline-nitride based devices | Craig Metzner, Joe H. Lamb | 2017-09-12 |
| 9356188 | Tensile separation of a semiconducting stack | Jia-Sheng Lee, Craig Metzner | 2016-05-31 |
| 9230846 | Multi-wafer rotating disc reactor with inertial planetary drive | Adrian Celaru, Todd A. Luse, Joseph Scandariato, Qingfu Tang | 2016-01-05 |
| 8562746 | Sectional wafer carrier | Alexander I. Gurary, Joseph A. Kraus, William E. Quinn, David A. Crewe | 2013-10-22 |
| 7713881 | Process sequence for doped silicon fill of deep trenches | Somnath Nag | 2010-05-11 |
| 7446366 | Process sequence for doped silicon fill of deep trenches | Somnath Nag | 2008-11-04 |
| 7393561 | Method and apparatus for layer by layer deposition of thin films | — | 2008-07-01 |
| 7354848 | Poly-silicon-germanium gate stack and method for forming the same | Kangzhan Zhang | 2008-04-08 |
| 7109097 | Process sequence for doped silicon fill of deep trenches | Somnath Nag | 2006-09-19 |
| 7037574 | Atomic layer deposition for fabricating thin films | Sanjay Gopinath, Thomas R. Omstead, Randhir Bubber, Ming Mao | 2006-05-02 |
| 6905578 | Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure | Mehrdad M. Moslehi, Cecil J. Davis, Christopher Mann, Dwain R. Jakubik | 2005-06-14 |
| 6812126 | Method for fabricating a semiconductor chip interconnect | Mehrdad M. Moslehi, Randhir Bubber, Lino Velo | 2004-11-02 |
| 6696931 | Retrofittable vehicle collision warning apparatus | — | 2004-02-24 |
| 6645847 | Microelectronic interconnect material with adhesion promotion layer and fabrication method | Mehrdad M. Moslehi, Boris Relja, Randhir Bubber, Lino Velo, Thomas R. Omstead +3 more | 2003-11-11 |
| 6627995 | Microelectronic interconnect material with adhesion promotion layer and fabrication method | Mehrdad M. Moslehi, Boris Relja, Randhir Bubber, Lino Velo, Thomas R. Omstead +3 more | 2003-09-30 |
| 6596133 | Method and system for physically-assisted chemical-vapor deposition | Mehrdad M. Moslehi | 2003-07-22 |
| 6592728 | Dual collimated deposition apparatus and method of use | Peter V. Schwartz, Jacques Kools, Kang Song, Dorian Heimanson, Mehrdad M. Moslehi | 2003-07-15 |
| 6572744 | Dual collimated deposition apparatus and method of use | Peter V. Schwartz, Jacques Kools, Kang Song, Dorian Heimanson, Mehrdad M. Moslehi | 2003-06-03 |
| 6471830 | Inductively-coupled-plasma ionized physical-vapor deposition apparatus, method and system | Mehrdad M. Moslehi | 2002-10-29 |
| 6461675 | Method for forming a copper film on a substrate | Mehrdad M. Moslehi, Lino Velo, Thomas R. Omstead, David Campbell, Zeming Liu +1 more | 2002-10-08 |
| 6444103 | Method and apparatus for thin film deposition using an active shutter | Mehrdad M. Moslehi, Yong Jin Lee, Cecil J. Davis | 2002-09-03 |