Issued Patents All Time
Showing 25 most recent of 90 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6905578 | Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure | Mehrdad M. Moslehi, Christopher Mann, Dwain R. Jakubik, Ajit Paranjpe | 2005-06-14 |
| 6705394 | Rapid cycle chuck for low-pressure processing | Mehrdad M. Moslehi, Xiangqun Chen, Shiyuan Cheng | 2004-03-16 |
| 6685073 | Method and apparatus for stretching and processing saw film tape after breaking a partially sawn wafer | Robert G. McKenna, David Durin, Don Reed Brown, John I. Jones | 2004-02-03 |
| 6508885 | Edge sealing structure for substrate in low-pressure processing environment | Mehrdad M. Moslehi | 2003-01-21 |
| 6475359 | Thin-film processing electromagnet with modified core for producing low-skew magnetic orientation | Mehrdad M. Moslehi, Shiyuan Cheng, Xiangqun Chen | 2002-11-05 |
| 6444103 | Method and apparatus for thin film deposition using an active shutter | Mehrdad M. Moslehi, Yong Jin Lee, Ajit Paranjpe | 2002-09-03 |
| 6221217 | Physical vapor deposition system having reduced thickness backing plate | Mehrdad M. Moslehi, Dorian Heimanson, Thomas R. Omstead | 2001-04-24 |
| 6126790 | Method of magnetically orienting thin magnetic films with a multiple-coil electromagnet | Mehrdad M. Moslehi, Shiyuan Cheng, Dorian Heimanson | 2000-10-03 |
| 6106682 | Thin-film processing electromagnet for low-skew magnetic orientation | Mehrdad M. Moslehi, Shiyuan Cheng, Xiangqun Chen | 2000-08-22 |
| 6073576 | Substrate edge seal and clamp for low-pressure processing equipment | Mehrdad M. Moslehi | 2000-06-13 |
| 6042707 | Multiple-coil electromagnet for magnetically orienting thin films | Mehrdad M. Moslehi, Shiyuan Cheng, Dorian Heimanson | 2000-03-28 |
| 6039848 | Ultra-high vacuum apparatus and method for high productivity physical vapor deposition. | Mehrdad M. Moslehi, Dorian Heimanson | 2000-03-21 |
| 5972803 | High throughput optical curing process for semiconductor device manufacturing | Jing Shu, Ming-Jang Hwang, Mehrdad M. Moslehi | 1999-10-26 |
| 5876573 | High magnetic flux cathode apparatus and method for high productivity physical-vapor deposition | Mehrdad M. Moslehi, Dorian Heimanson, Thomas R. Omstead | 1999-03-02 |
| 5653838 | Glass heating and sealing system | Ming-Jang Hwang, Chi-Cheong Shen, Robert T. Matthews, Phillip Chapados, Jr. | 1997-08-05 |
| 5591493 | Structure and method for incorporating an inductively coupled plasma source in a plasma processing chamber | Ajit Paranjpe, Robert T. Matthews | 1997-01-07 |
| 5580385 | Structure and method for incorporating an inductively coupled plasma source in a plasma processing chamber | Ajit Paranjpe, Robert T. Matthews | 1996-12-03 |
| 5464499 | Multi-electrode plasma processing apparatus | Mehrdad M. Moslehi, John I. Jones, Robert T. Matthews | 1995-11-07 |
| 5453124 | Programmable multizone gas injector for single-wafer semiconductor processing equipment | Mehrdad M. Moslehi, Robert T. Matthews | 1995-09-26 |
| 5446825 | High performance multi-zone illuminator module for semiconductor wafer processing | Mehrdad M. Moslehi, Robert T. Matthews | 1995-08-29 |
| 5435379 | Method and apparatus for low-temperature semiconductor processing | Mehrdad M. Moslehi, Habib N. Najm, Ajit Paranjpe | 1995-07-25 |
| 5367606 | Multi-zone illuminator with embedded process control sensors | Mehrdad M. Moslehi, Robert T. Matthews | 1994-11-22 |
| 5345534 | Semiconductor wafer heater with infrared lamp module with light blocking means | Habib N. Najm, Steve S. Huang, Robert T. Matthews | 1994-09-06 |
| 5286297 | Multi-electrode plasma processing apparatus | Mehrdad M. Moslehi, John I. Jones, Robert T. Matthews | 1994-02-15 |
| 5268989 | Multi zone illuminator with embeded process control sensors and light interference elimination circuit | Mehrdad M. Moslehi, Robert T. Matthews | 1993-12-07 |