Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6122041 | Liquid cooled light pipe assembly for pyrometric temperature measurement | Mehrdad M. Moslehi | 2000-09-19 |
| 5508934 | Multi-point semiconductor wafer fabrication process temperature control system | Mehrdad M. Moslehi | 1996-04-16 |
| 5435379 | Method and apparatus for low-temperature semiconductor processing | Mehrdad M. Moslehi, Ajit Paranjpe, Cecil J. Davis | 1995-07-25 |
| 5345534 | Semiconductor wafer heater with infrared lamp module with light blocking means | Steve S. Huang, Cecil J. Davis, Robert T. Matthews | 1994-09-06 |
| 5326170 | Wireless temperature calibration device and method | Mehrdad M. Moslehi, Lino Velo | 1994-07-05 |
| 5317656 | Fiber optic network for multi-point emissivity-compensated semiconductor wafer pyrometry | Mehrdad M. Moslehi | 1994-05-31 |
| 5305417 | Apparatus and method for determining wafer temperature using pyrometry | Mehrdad M. Moslehi, Somnath Banerjee, Lino Velo | 1994-04-19 |
| 5265957 | Wireless temperature calibration device and method | Mehrdad M. Moslehi, Lino Velo | 1993-11-30 |
| 5255286 | Multi-point pyrometry with real-time surface emissivity compensation | Mehrdad M. Moslehi | 1993-10-19 |
| 5156461 | Multi-point pyrometry with real-time surface emissivity compensation | Mehrdad M. Moslehi | 1992-10-20 |
| 5139288 | Coupling device for providing electrical and thermal insulation under high pressure, cryogenic conditions | Cecil J. Davis, Gregory E. Gardner | 1992-08-18 |