| 5760573 |
Plasma density monitor and method |
Ajit Paranjpe |
1998-06-02 |
| 5389153 |
Plasma processing system using surface wave plasma generating apparatus and method |
Ajit Paranjpe |
1995-02-14 |
| 5345534 |
Semiconductor wafer heater with infrared lamp module with light blocking means |
Habib N. Najm, Cecil J. Davis, Robert T. Matthews |
1994-09-06 |
| 5262610 |
Low particulate reliability enhanced remote microwave plasma discharge device |
Cecil J. Davis, Rhett B. Jucha, Lee M. Loewenstein |
1993-11-16 |
| 5101764 |
Method and apparatus for integrating optical sensor into processor |
Lee M. Loewenstein, Thomas E. Tang, Ming-Jang Hwang, Rachelle J. Bienstock |
1992-04-07 |
| 4996077 |
Distributed ECR remote plasma processing and apparatus |
Mehrdad M. Moslehi |
1991-02-26 |
| 4988644 |
Method for etching semiconductor materials using a remote plasma generator |
Rhett B. Jucha, Cecil J. Davis, Lee M. Loewenstein, Jeff D. Achenbach |
1991-01-29 |