Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4997520 | Method for etching tungsten | Rhett B. Jucha, Cecil J. Davis, Duane E. Carter | 1991-03-05 |
| 4988644 | Method for etching semiconductor materials using a remote plasma generator | Rhett B. Jucha, Cecil J. Davis, Steve S. Huang, Lee M. Loewenstein | 1991-01-29 |