| 6774339 |
Hermetic sealing of target/backing plate assemblies using electron beam melted indium or tin |
David B. Smathers, Michael Scott Gutkin |
2004-08-10 |
| 6592728 |
Dual collimated deposition apparatus and method of use |
Ajit Paranjpe, Peter V. Schwartz, Jacques Kools, Kang Song, Mehrdad M. Moslehi |
2003-07-15 |
| 6572744 |
Dual collimated deposition apparatus and method of use |
Ajit Paranjpe, Peter V. Schwartz, Jacques Kools, Kang Song, Mehrdad M. Moslehi |
2003-06-03 |
| 6235164 |
Low-pressure processing system for magnetic orientation of thin magnetic film |
Kevin S. Gerrish, Paul H. Ballentine, Alan Thomas Stephens, II |
2001-05-22 |
| 6221217 |
Physical vapor deposition system having reduced thickness backing plate |
Mehrdad M. Moslehi, Cecil J. Davis, Thomas R. Omstead |
2001-04-24 |
| 6126790 |
Method of magnetically orienting thin magnetic films with a multiple-coil electromagnet |
Mehrdad M. Moslehi, Shiyuan Cheng, Cecil J. Davis |
2000-10-03 |
| 6042707 |
Multiple-coil electromagnet for magnetically orienting thin films |
Mehrdad M. Moslehi, Shiyuan Cheng, Cecil J. Davis |
2000-03-28 |
| 6039848 |
Ultra-high vacuum apparatus and method for high productivity physical vapor deposition. |
Mehrdad M. Moslehi, Cecil J. Davis |
2000-03-21 |
| 5950723 |
Method of regulating substrate temperature in a low pressure environment |
Thomas R. Omstead |
1999-09-14 |
| 5902466 |
Sputtering apparatus with magnetic orienting device for thin film deposition |
Kevin S. Gerrish, Paul H. Ballentine, Alan Thomas Stephens, II |
1999-05-11 |
| 5876573 |
High magnetic flux cathode apparatus and method for high productivity physical-vapor deposition |
Mehrdad M. Moslehi, Cecil J. Davis, Thomas R. Omstead |
1999-03-02 |
| 5775416 |
Temperature controlled chuck for vacuum processing |
Thomas R. Omstead |
1998-07-07 |
| 5746897 |
High magnetic flux permanent magnet array apparatus and method for high productivity physical vapor deposition |
Mehrdad M. Moslehi, Paul E. Spronz, Thomas R. Omstead |
1998-05-05 |
| 5630916 |
Magnetic orienting device for thin film deposition and method of use |
Kevin S. Gerrish, Paul H. Ballentine, Alan Thomas Stephens, II |
1997-05-20 |
| 5248402 |
Apple-shaped magnetron for sputtering system |
Paul H. Ballentine, Alan Thomas Stephens, II |
1993-09-28 |