Issued Patents All Time
Showing 26–50 of 90 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5262610 | Low particulate reliability enhanced remote microwave plasma discharge device | Steve S. Huang, Rhett B. Jucha, Lee M. Loewenstein | 1993-11-16 |
| 5248636 | Processing method using both a remotely generated plasma and an in-situ plasma with UV irradiation | Rhett B. Jucha, Joseph D. Luttmer, Rudy L. York, Lee M. Loewenstein, Robert T. Matthews +1 more | 1993-09-28 |
| 5217559 | Apparatus and method for in-situ deep ultraviolet photon-assisted semiconductor wafer processing | Mehrdad M. Moslehi, Ajit Paranjpe | 1993-06-08 |
| 5138973 | Wafer processing apparatus having independently controllable energy sources | Rhett B. Jucha, Joseph D. Luttmer, Rudy L. York, Lee M. Loewenstein, Robert T. Matthews +1 more | 1992-08-18 |
| 5139288 | Coupling device for providing electrical and thermal insulation under high pressure, cryogenic conditions | Habib N. Najm, Gregory E. Gardner | 1992-08-18 |
| 5102231 | Semiconductor wafer temperature measurement system and method | Lee M. Loewenstein, John David Lawrence, Wayne G. Fisher | 1992-04-07 |
| 5094936 | High pressure photoresist silylation process and apparatus | George R. Misium, Cesar M. Garza | 1992-03-10 |
| 5082542 | Distributed-array magnetron-plasma processing module and method | Mehrdad M. Moslehi | 1992-01-21 |
| 5077092 | Method and apparatus for deposition of zinc sulfide films | Patricia B. Smith, Larry D. Hutchins, Rudy L. York, Joseph D. Luttmer | 1991-12-31 |
| 5044871 | Integrated circuit processing system | Robert T. Matthews, Robert A. Bowling | 1991-09-03 |
| 4997520 | Method for etching tungsten | Rhett B. Jucha, Duane E. Carter, Jeff D. Achenbach | 1991-03-05 |
| 4988533 | Method for deposition of silicon oxide on a wafer | Dean W. Freeman, Joseph D. Luttmer, Patricia B. Smith | 1991-01-29 |
| 4988644 | Method for etching semiconductor materials using a remote plasma generator | Rhett B. Jucha, Steve S. Huang, Lee M. Loewenstein, Jeff D. Achenbach | 1991-01-29 |
| 4966519 | Integrated circuit processing system | Robert T. Matthews, Robert A. Bowling | 1990-10-30 |
| 4949671 | Processing apparatus and method | Robert T. Matthews, Rudy L. York, Joseph D. Luttmer, Dwain R. Jakubik, James B. Hunter | 1990-08-21 |
| 4943457 | Vacuum slice carrier | Robert T. Matthews | 1990-07-24 |
| 4923562 | Processing of etching refractory metals | Rhett B. Jucha | 1990-05-08 |
| 4916091 | Plasma and plasma UV deposition of SiO.sub.2 | Dean W. Freeman, James B. Burris, Lee M. Loewenstein | 1990-04-10 |
| 4915777 | Method for etching tungsten | Rhett B. Jucha, Monte A. Douglas | 1990-04-10 |
| 4911103 | Processing apparatus and method | Dean W. Freeman, Robert T. Matthews, Joel T. Tomlin, Rhett B. Jucha | 1990-03-27 |
| 4910043 | Processing apparatus and method | Dean W. Freeman, James B. Burris, Lee M. Lowenstein | 1990-03-20 |
| 4906328 | Method for wafer treating | Dean W. Freeman, James B. Burris, Lee M. Loewenstein | 1990-03-06 |
| 4904621 | Remote plasma generation process using a two-stage showerhead | Lee M. Loewenstein | 1990-02-27 |
| 4891488 | Processing apparatus and method | Rhett B. Jucha | 1990-01-02 |
| 4891087 | Isolation substrate ring for plasma reactor | John E. Spencer, Thomas D. Bonifield, Rhett B. Jucha, William J. Stiltz, Randall E. Johnson +2 more | 1990-01-02 |