Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4916091 | Plasma and plasma UV deposition of SiO.sub.2 | Dean W. Freeman, Cecil J. Davis, Lee M. Loewenstein | 1990-04-10 |
| 4910043 | Processing apparatus and method | Dean W. Freeman, Cecil J. Davis, Lee M. Lowenstein | 1990-03-20 |
| 4906328 | Method for wafer treating | Dean W. Freeman, Cecil J. Davis, Lee M. Loewenstein | 1990-03-06 |
| 4882299 | Deposition of polysilicon using a remote plasma and in situ generation of UV light. | Dean W. Freeman | 1989-11-21 |