Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5096856 | In-situ doped silicon using tertiary butyl phosphine | — | 1992-03-17 |
| 5023206 | Semiconductor device with adjacent non-oxide layers and the fabrication thereof | — | 1991-06-11 |
| 4988533 | Method for deposition of silicon oxide on a wafer | Joseph D. Luttmer, Patricia B. Smith, Cecil J. Davis | 1991-01-29 |
| 4916091 | Plasma and plasma UV deposition of SiO.sub.2 | James B. Burris, Cecil J. Davis, Lee M. Loewenstein | 1990-04-10 |
| 4911103 | Processing apparatus and method | Cecil J. Davis, Robert T. Matthews, Joel T. Tomlin, Rhett B. Jucha | 1990-03-27 |
| 4910043 | Processing apparatus and method | James B. Burris, Cecil J. Davis, Lee M. Lowenstein | 1990-03-20 |
| 4906328 | Method for wafer treating | James B. Burris, Cecil J. Davis, Lee M. Loewenstein | 1990-03-06 |
| 4882299 | Deposition of polysilicon using a remote plasma and in situ generation of UV light. | James B. Burris | 1989-11-21 |
| 4877753 | In situ doped polysilicon using tertiary butyl phosphine | — | 1989-10-31 |
| 4863561 | Method and apparatus for cleaning integrated circuit wafers | Cecil J. Davis | 1989-09-05 |
| 4832778 | Processing apparatus for wafers | Cecil J. Davis, Robert T. Matthews, Joel T. Tomlin | 1989-05-23 |
| 4822450 | Processing apparatus and method | Cecil J. Davis, Lee M. Loewenstein, Rhett B. Jucha, Robert T. Matthews, Randall C. Hildenbrand +1 more | 1989-04-18 |
| 4810673 | Oxide deposition method | — | 1989-03-07 |