Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5248636 | Processing method using both a remotely generated plasma and an in-situ plasma with UV irradiation | Cecil J. Davis, Rhett B. Jucha, Joseph D. Luttmer, Rudy L. York, Lee M. Loewenstein +1 more | 1993-09-28 |
| 5138973 | Wafer processing apparatus having independently controllable energy sources | Cecil J. Davis, Rhett B. Jucha, Joseph D. Luttmer, Rudy L. York, Lee M. Loewenstein +1 more | 1992-08-18 |
| 4886570 | Processing apparatus and method | Cecil J. Davis, Robert T. Matthews, Lee M. Loewenstein, Rhett B. Jucha, John I. Jones | 1989-12-12 |
| 4872938 | Processing apparatus | Cecil J. Davis, Joseph V. Abernathy, Robert T. Matthews, Bruce Simpson, John I. Jones +2 more | 1989-10-10 |
| 4836905 | Processing apparatus | Cecil J. Davis, Joseph V. Abernathy, Robert T. Matthews, Bruce Simpson, James G. Bohlman +2 more | 1989-06-06 |
| 4822450 | Processing apparatus and method | Cecil J. Davis, Lee M. Loewenstein, Rhett B. Jucha, Robert T. Matthews, Dean W. Freeman +1 more | 1989-04-18 |
| 4816116 | Semiconductor wafer transfer method and arm mechanism | Cecil J. Davis, Robert T. Matthews | 1989-03-28 |
| 4687542 | Vacuum processing system | Cecil J. Davis, Robert T. Matthews | 1987-08-18 |
| 4657618 | Powered load lock electrode/substrate assembly including robot arm, optimized for plasma process uniformity and rate | John E. Spencer, Randall E. Johnson, Dan Hockersmith, John I. Jones, William S. Jaspersen | 1987-04-14 |
| 4657620 | Automated single slice powered load lock plasma reactor | Cecil J. Davis, John E. Spencer, Dan Hockersmith, Frederick W. Brown, Stanford P. Kohan | 1987-04-14 |