Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5384267 | Method of forming infrared detector by hydrogen plasma etching to form refractory metal interconnects | Larry D. Hutchins | 1995-01-24 |
| 5248636 | Processing method using both a remotely generated plasma and an in-situ plasma with UV irradiation | Cecil J. Davis, Rhett B. Jucha, Joseph D. Luttmer, Lee M. Loewenstein, Robert T. Matthews +1 more | 1993-09-28 |
| 5188970 | Method for forming an infrared detector having a refractory metal | Joseph D. Luttmer, Chang-Feng Wan, Thomas W. Orent, Larry D. Hutchins, Art Simmons | 1993-02-23 |
| 5157000 | Method for dry etching openings in integrated circuit layers | Jerome L. Elkind, Patricia B. Smith, Larry D. Hutchins, Joseph D. Luttmer, Julie S. England | 1992-10-20 |
| 5138973 | Wafer processing apparatus having independently controllable energy sources | Cecil J. Davis, Rhett B. Jucha, Joseph D. Luttmer, Lee M. Loewenstein, Robert T. Matthews +1 more | 1992-08-18 |
| 5132761 | Method and apparatus for forming an infrared detector having a refractory metal | Joseph D. Luttmer, Chang-Feng Wan, Thomas W. Orent, Larry D. Hutchins, Art Simmons | 1992-07-21 |
| 5077092 | Method and apparatus for deposition of zinc sulfide films | Patricia B. Smith, Larry D. Hutchins, Joseph D. Luttmer, Cecil J. Davis | 1991-12-31 |
| 5017511 | Method for dry etching vias in integrated circuit layers | Jerome L. Elkind, Patricia B. Smith, Larry D. Hutchins, Joseph D. Luttmer, Julie S. England | 1991-05-21 |
| 4949671 | Processing apparatus and method | Cecil J. Davis, Robert T. Matthews, Joseph D. Luttmer, Dwain R. Jakubik, James B. Hunter | 1990-08-21 |
| 4877757 | Method of sequential cleaning and passivating a GaAs substrate using remote oxygen plasma | Joseph D. Luttmer, Patricia B. Smith, Cecil J. Davis | 1989-10-31 |
| 4855160 | Method for passivating wafer | Joseph D. Luttmer, Cecil J. Davis, Patricia B. Smith | 1989-08-08 |
| 4838984 | Method for etching films of mercury-cadmium-telluride and zinc sulfid | Joseph D. Luttmer, Cecil J. Davis, Patricia B. Smith, Lee M. Loewenstein, Rhett B. Jucha | 1989-06-13 |
| 4837113 | Method for depositing compound from group II-VI | Joseph D. Luttmer, Patricia B. Smith, Cecil J. Davis | 1989-06-06 |
| 4620209 | Mosaic pattern of infrared detectors of different cut off wave lengths | Sidney G. Parker | 1986-10-28 |