Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4936007 | Method of holding a part for fabrication | Brad W. Larson, Thomas H. Taylor, John M. Bedinger, Rick Kottman, Steve Pebley | 1990-06-26 |
| 4925167 | Universal tooling system for microwave hybrid devices | Brad W. Larson, Thomas H. Taylor, John M. Bedinger, Rick Kottman, Steve Pebley | 1990-05-15 |
| 4661196 | Plasma etch movable substrate | Joe W. Gilbert | 1987-04-28 |
| 4657618 | Powered load lock electrode/substrate assembly including robot arm, optimized for plasma process uniformity and rate | John E. Spencer, Randall E. Johnson, Randall C. Hildenbrand, John I. Jones, William S. Jaspersen | 1987-04-14 |
| 4657620 | Automated single slice powered load lock plasma reactor | Cecil J. Davis, John E. Spencer, Randall C. Hildenbrand, Frederick W. Brown, Stanford P. Kohan | 1987-04-14 |