Issued Patents All Time
Showing 76–90 of 90 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4832777 | Processing apparatus and method | Robert T. Matthews | 1989-05-23 |
| 4830700 | Processing apparatus and method | Robert T. Matthews, Wayne G. Fisher | 1989-05-16 |
| 4830705 | Method for etch of GaAs | Lee M. Loewenstein | 1989-05-16 |
| 4828649 | Method for etching an aluminum film doped with silicon | Lee M. Loewenstein, Rhett B. Jucha | 1989-05-09 |
| 4822450 | Processing apparatus and method | Lee M. Loewenstein, Rhett B. Jucha, Robert T. Matthews, Randall C. Hildenbrand, Dean W. Freeman +1 more | 1989-04-18 |
| 4820377 | Method for cleanup processing chamber and vacuum process module | Robert T. Matthews, Rhett B. Jucha, Lee M. Loewenstein | 1989-04-11 |
| 4818327 | Wafer processing apparatus | Robert T. Matthews | 1989-04-04 |
| 4818326 | Processing apparatus | Jiann Liu, Lee M. Loewenstein | 1989-04-04 |
| 4816098 | Apparatus for transferring workpieces | Robert T. Matthews | 1989-03-28 |
| 4816116 | Semiconductor wafer transfer method and arm mechanism | Robert T. Matthews, Randall C. Hildenbrand | 1989-03-28 |
| 4687542 | Vacuum processing system | Robert T. Matthews, Randall C. Hildenbrand | 1987-08-18 |
| 4685999 | Apparatus for plasma assisted etching | Duane E. Carter, Rhett B. Jucha | 1987-08-11 |
| 4659413 | Automated single slice cassette load lock plasma reactor | John E. Spencer, Randall E. Johnson, Rhett B. Jucha, Frederick W. Brown, Stanford P. Kohan | 1987-04-21 |
| 4657620 | Automated single slice powered load lock plasma reactor | John E. Spencer, Dan Hockersmith, Randall C. Hildenbrand, Frederick W. Brown, Stanford P. Kohan | 1987-04-14 |
| 4654106 | Automated plasma reactor | Randall E. Johnson, John E. Spencer | 1987-03-31 |