Issued Patents All Time
Showing 25 most recent of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7732225 | Method for measuring contamination in liquids at PPQ levels | Jeffrey Hanson, Lee M. Loewenstein | 2010-06-08 |
| 6432317 | Method to produce masking | Richard Stoltz | 2002-08-13 |
| 6177358 | Photo-stimulated etching of CaF2 | — | 2001-01-23 |
| 6024801 | Method of cleaning and treating a semiconductor device including a micromechanical device | Robert M. Wallace | 2000-02-15 |
| 5868856 | Method for removing inorganic contamination by chemical derivitization and extraction | Allen Templeton | 1999-02-09 |
| 5868862 | Method of removing inorganic contamination by chemical alteration and extraction in a supercritical fluid media | Allen Templeton | 1999-02-09 |
| 5695569 | Removal of metal contamination | — | 1997-12-09 |
| 5695570 | Method for the photo-stimulated removal of trace metals from a semiconductor surface | — | 1997-12-09 |
| 5584938 | Electrostatic particle removal and characterization | — | 1996-12-17 |
| 5565179 | Electrostatic particle removal and characterization | — | 1996-10-15 |
| 5545290 | Etching method | — | 1996-08-13 |
| 5520992 | Electrodes for high dielectric constant materials | Scott R. Summerfelt | 1996-05-28 |
| 5482564 | Method of unsticking components of micro-mechanical devices | Robert M. Wallace | 1996-01-09 |
| 5460687 | Anisotropic liquid phase photochemical etch | — | 1995-10-24 |
| 5431774 | Copper etching | — | 1995-07-11 |
| 5418114 | Anisotropic liquid phase photochemical mercury cadmium telluride etch | — | 1995-05-23 |
| 5387497 | High resolution lithography method using hydrogen developing reagent | — | 1995-02-07 |
| 5374330 | Anisotropic barium strontium titanate etch | — | 1994-12-20 |
| 5318662 | Copper etch process using halides | — | 1994-06-07 |
| 5316895 | Photolithographic method using non-photoactive resins | — | 1994-05-31 |
| 5312516 | Anisotropic tantalum pentoxide etch | Howard R. Beratan, Scott R. Summerfelt | 1994-05-17 |
| 5279702 | Anisotropic liquid phase photochemical copper etch | — | 1994-01-18 |
| 5238530 | Anisotropic titanate etch | Howard R. Beratan, Scott R. Summerfelt | 1993-08-24 |
| 5238529 | Anisotropic metal oxide etch | — | 1993-08-24 |
| 5201989 | Anisotropic niobium pentoxide etch | Howard R. Beratan, Scott R. Summerfelt | 1993-04-13 |