Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10985046 | Micro-LED transfer methods using light-based debonding | Ajit Paranjpe | 2021-04-20 |
| 10571430 | Gas concentration sensors and systems | Chi-Jung Cheng, Leo Chin, Arindam Sinharoy, Raymond C. Logue | 2020-02-25 |
| 9041931 | Substrate analysis using surface acoustic wave metrology | Michael Colgan, Michael Kotelyanskii, Humphrey J. Maris | 2015-05-26 |
| 7705974 | Metrology system with spectroscopic ellipsometer and photoacoustic measurements | Robert Gregory Wolf, Robin Mair | 2010-04-27 |
| 7522272 | Metrology system with spectroscopic ellipsometer and photoacoustic measurements | Robert Gregory Wolf, Robin Mair | 2009-04-21 |
| 7253887 | Metrology system with spectroscopic ellipsometer and photoacoustic measurements | Robert Gregory Wolf, Robin Mair | 2007-08-07 |
| 7050178 | Method and apparatus for increasing signal to noise ratio in a photoacoustic film thickness measurement system | Robert J. Stoner | 2006-05-23 |
| 7019845 | Measuring elastic moduli of dielectric thin films using an optical metrology system | Sean P. Leary, Guray Tas, Michael Kotelyanskii, Tong Zheng, Guenadiy Lazarov +3 more | 2006-03-28 |
| 7006221 | Metrology system with spectroscopic ellipsometer and photoacoustic measurements | Robert Gregory Wolf, Robin Mair | 2006-02-28 |
| 6504618 | Method and apparatus for decreasing thermal loading and roughness sensitivity in a photoacoustic film thickness measurement system | Andrey Vertikov | 2003-01-07 |