Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12092565 | Non-destructive inspection and manufacturing metrology systems and methods | Manjusha Mehendale, Marco Alves | 2024-09-17 |
| 11988641 | Characterization of patterned structures using acoustic metrology | Manjusha Mehendale, Michael Kotelyanskii, Priya Mukundhan | 2024-05-21 |
| 11668644 | Opto-acoustic measurement of a transparent film stack | George Andrew Antonelli, Manjusha Mehendale, Nicholas James Keller | 2023-06-06 |
| 9991176 | Non-destructive acoustic metrology for void detection | Manjusha Mehendale, Michael Kotelyanskii, Todd W. Murray, Priya Mukundhan, Jacob D. Dove +3 more | 2018-06-05 |
| 9576862 | Optical acoustic substrate assessment system and method | Todd W. Murray, Manjusha Mehendale, Michael Kotelyanskii, Priya Mukundhan | 2017-02-21 |
| 7705974 | Metrology system with spectroscopic ellipsometer and photoacoustic measurements | Robert Gregory Wolf, Christopher Morath | 2010-04-27 |
| 7522272 | Metrology system with spectroscopic ellipsometer and photoacoustic measurements | Robert Gregory Wolf, Christopher Morath | 2009-04-21 |
| 7253887 | Metrology system with spectroscopic ellipsometer and photoacoustic measurements | Robert Gregory Wolf, Christopher Morath | 2007-08-07 |
| 7006221 | Metrology system with spectroscopic ellipsometer and photoacoustic measurements | Robert Gregory Wolf, Christopher Morath | 2006-02-28 |