Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12092565 | Non-destructive inspection and manufacturing metrology systems and methods | Marco Alves, Robin Mair | 2024-09-17 |
| 11988641 | Characterization of patterned structures using acoustic metrology | Michael Kotelyanskii, Priya Mukundhan, Robin Mair | 2024-05-21 |
| 11668644 | Opto-acoustic measurement of a transparent film stack | George Andrew Antonelli, Robin Mair, Nicholas James Keller | 2023-06-06 |
| 9991176 | Non-destructive acoustic metrology for void detection | Michael Kotelyanskii, Todd W. Murray, Robin Mair, Priya Mukundhan, Jacob D. Dove +3 more | 2018-06-05 |
| 9576862 | Optical acoustic substrate assessment system and method | Todd W. Murray, Michael Kotelyanskii, Robin Mair, Priya Mukundhan | 2017-02-21 |
| 9140601 | Position sensitive detection optimization | Michael Kotelyanskii, Priya Mukundhan, Michael Colgan, Wei Zhou | 2015-09-22 |
| 7903238 | Combination of ellipsometry and optical stress generation and detection | Michael Kotelyanskii, Yanwen Hou, Jim Onderko, Guray Tas | 2011-03-08 |
| 6884960 | Methods for creating optical structures in dielectrics using controlled energy deposition | Orson Bourne, David Rayner, Paul Corkum, Andrei Naumov | 2005-04-26 |